Moving Tunable Filters Forward

被引:19
作者
Hashimoto, Ken-ya [1 ]
Kimura, Tetsuya [2 ]
Matsumura, Takeshi [3 ]
Hirano, Hideki [4 ]
Kadota, Michio [4 ]
Esashi, Masayoshi [5 ]
Tanaka, Shuji [4 ]
机构
[1] Chiba Univ, Grad Sch Engn, Chiba, Japan
[2] Murata Mfg Corp Ltd, Kyoto, Japan
[3] Natl Inst Informat & Commun Technol, Yokosuka, Kanagawa, Japan
[4] Tohoku Univ, Grad Sch Engn, Sendai, Miyagi 980, Japan
[5] Tohoku Univ, WPI Adv Inst Mat Res, Sendai, Miyagi 980, Japan
基金
日本学术振兴会;
关键词
RESONATORS; RECEIVER; DEVICES; SYSTEM; RADIO; FILM;
D O I
10.1109/MMM.2015.2431237
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This article discusses the possibility of tunable RF surface-acoustic-wave (SAW) and bulkacoustic-wave (BAW) filters using varactors (VCs) integrated by the skillful use of micro-electromechanical system (MEMS) technologies. First, the reasons that RF tunable filters are in demand for current wireless communications are explored, and various RF tunable filters are surveyed and compared. Next comes a discussion of tunable RF SAW/BAW filters combined with MEMS technologies, showing that high performance can be expected, provided that some key technologies are developed. Finally, the article introduces tunable SAW filters, which the authors developed in a research project called «heterointegration» to demonstrate what is possible by combining MEMS technologies with RF SAW/BAW technologies. © 2000-2012 IEEE.
引用
收藏
页码:89 / 97
页数:9
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