High-Speed Photodetectors on Silicon Photonics Platform for Optical Interconnect

被引:52
作者
Chen, Guanyu [1 ,2 ,3 ]
Yu, Yu [1 ,2 ]
Shi, Yang [1 ,2 ]
Li, Nanxi [4 ]
Luo, Wei [5 ]
Cao, Lin [5 ]
Danner, Aaron J. [3 ]
Liu, Ai-Qun [5 ]
Zhang, Xinliang [1 ,2 ]
机构
[1] Huazhong Univ Sci & Technol, Wuhan Natl Lab Optoelect, Wuhan 430074, Peoples R China
[2] Huazhong Univ Sci & Technol, Sch Opt & Elect Informat, Wuhan 430074, Peoples R China
[3] Natl Univ Singapore, Dept Elect & Comp Engn, 4 Engn Dr 3, Singapore 117583, Singapore
[4] ASTAR, Inst Microelect, 2 Fusionopolis Way, Singapore 138634, Singapore
[5] Nanyang Technol Univ, Quantum Sci & Engn Ctr QSec, 50 Nanyang Ave, Singapore 639798, Singapore
基金
新加坡国家研究基金会; 中国国家自然科学基金;
关键词
integrated photonics; optical interconnects; optoelectronics; photodetector; radio frequency photonics; I-N PHOTODETECTOR; WAVE-GUIDE PHOTODETECTOR; LOW DARK CURRENT; SEMICONDUCTOR-METAL PHOTODETECTORS; III-V PHOTODETECTORS; HIGH-PERFORMANCE; HIGH-RESPONSIVITY; GERMANIUM PHOTODETECTOR; ON-CHIP; GRAPHENE PHOTODETECTOR;
D O I
10.1002/lpor.202200117
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
A photodetector (PD) converts optical signals into electrical ones and is widely used in optical interconnect. High-speed PDs are in high demand as they are necessary to meet requirements of large-capacity optical interconnect. Many high-performance PDs with various absorption materials and structures are demonstrated on silicon photonics platform, including germanium (Ge) PDs, germanium tin (GeSn) PDs, heterogeneous integrated III-V PDs, all silicon (Si) PDs, 2D material PDs, etc. These kinds of PDs continue to set new records of speed and open an era of ultrahigh-speed optical interconnect. A comprehensive summary of the state-of-the-art high-speed PDs on silicon photonics platform is necessary and meaningful. In this review, the basic metrics and key process technologies for the PDs are introduced, and various types of high-speed PDs based on silicon photonics platform are reviewed and discussed. Furthermore, the summary and perspectives are provided. It is hoped that this review can provide readers more insights into recent advances in high-speed PDs on silicon photonics platform and contribute to the further development.
引用
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页数:39
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