Ni schottky diodes on cubic GaN -: art. no. 152112

被引:12
|
作者
As, DJ [1 ]
Potthast, S
Fernandez, J
Schörmann, J
Lischka, K
Nagasawa, H
Abe, M
机构
[1] Univ Gesamthsch Paderborn, Dept Phys, D-33098 Paderborn, Germany
[2] HOYA Adv Semicond Technol Co Ltd, Sagamihara, Kanagawa 2291125, Japan
关键词
D O I
10.1063/1.2193401
中图分类号
O59 [应用物理学];
学科分类号
摘要
Schottky diodes were fabricated by thermal evaporation of nickel on phase-pure cubic GaN(c-GaN) layers grown by plasma assisted molecular beam epitaxy on freestanding 3C-SiC. Detailed analysis of the I-V characteristics revealed the existence of a thin surface barrier at the Ni-semiconductor interface. Thermal annealing in air at 200 degrees C alters the composition of this thin surface barrier, reduces the leakage current by three orders of magnitude, and increases the breakdown voltage. The dependence of the breakdown voltage on the doping density of the c-GaN layers is in good agreement with calculated values. We obtain a critical electric-field strength of E(crit)congruent to 2.5x10(6) V/cm for c-GaN. (c) 2006 American Institute of Physics.
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页数:3
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