Nanostructural antireflecting coatings: Classification analysis (A review)

被引:34
作者
Baryshnikova, K. V. [1 ]
Kadochkin, A. S. [2 ]
Shalin, A. S. [1 ,2 ,3 ]
机构
[1] ITMO Univ, St Petersburg 197101, Russia
[2] Ulyanovsk State Univ, Ulyanovsk 432017, Russia
[3] Russian Acad Sci, Kotelnikov Inst Radio Engn & Elect, Ulyanovsk Branch, Ulyanovsk 432011, Russia
基金
俄罗斯基础研究基金会;
关键词
BROAD-BAND ANTIREFLECTION; SOLAR-CELLS; REFRACTIVE-INDEX; OMNIDIRECTIONAL ANTIREFLECTION; SUBWAVELENGTH STRUCTURES; OPTICAL ANTIREFLECTION; NANOCRYSTAL LAYERS; GRATING STRUCTURES; SILICON SURFACES; LARGE-AREA;
D O I
10.1134/S0030400X15090040
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Many modern optical instruments require the use of high-quality antireflecting coatings. Singleand multilayer homogeneous films are mainly used for this purpose. However, an alternative line is rapidly developed at present, which is devoted to the design and use of nanostructural systems for increasing the transparency of different media. Despite the unified principle of operation of these coatings, which is based on the destructive interference of waves in the direction of reflection of light, approaches to their implementation may differ significantly. Different types of nanostructural coatings are considered in detail and classified, their optical properties are compared, and special attention is paid to methods of their manufacture. It is shown that different antireflecting coatings should be used for different purposes, and that coatings that combine properties of several classes often have better antireflecting capabilities.
引用
收藏
页码:343 / 355
页数:13
相关论文
共 68 条
[1]  
[Anonymous], 2011, US Patent, Patent No. [7894137 B2, 7894137]
[2]  
[Anonymous], 1992, MECH PROP SPUTT FILM, V2
[3]  
[Anonymous], 1999, US Patent, Patent No. 5952084
[4]  
[Anonymous], 1974, US Patent, Patent No. 3829197
[5]  
[Anonymous], 1993, US Patent, Patent No. 5234748
[6]  
[Anonymous], 1904, British Patent, Patent No. 29561
[7]  
Arndt R. A., 1975, P 11 IEEE PHOT SPEC, P40
[8]   DIELECTRIC FUNCTIONS AND OPTICAL-PARAMETERS OF SI, GE, GAP, GAAS, GASB, INP, INAS, AND INSB FROM 1.5 TO 6.0 EV [J].
ASPNES, DE ;
STUDNA, AA .
PHYSICAL REVIEW B, 1983, 27 (02) :985-1009
[9]  
Atwater HA, 2010, NAT MATER, V9, P205, DOI [10.1038/NMAT2629, 10.1038/nmat2629]
[10]  
Born M., 2010, Principles of Optics