High-κ Gate Dielectrices for Nanoscale CMOS Devices: Status, Challenges, and Future

This paper describes historical efforts of replacing SiO2 by high-k dielectric, and an implementation of high-k/metal gate (HK/MG) gate stack into the product level of industry standard low power bulk technology and high performance silicon-on-insulator (SOI) complementary metal-oxide-semiconductor (CMOS) devices. HK/MG stack provides further device scaling in channel length and inversion thickness (T-inv), leading to enable contact gate pitch scaling. Mobility degradation with T-inv scaling and threshold voltage (V-t) variability due to random telegraph noise and random dopant fluctuations at 15nm node and beyond are discussed, followed by outlook of future generation CMOS devices.