NEM Switch Technologies for Low-Power Logic Applications

被引：0

作者：

Grogg, Daniel ^{[1
]}

Pu, Yu ^{[1
]}

Knoll, Armin ^{[1
]}

Duerig, Urs ^{[1
]}

Drechsler, Ute ^{[1
]}

Hagleitner, Christoph ^{[1
]}

Despont, Michel ^{[1
]}

机构：

[1] IBM Res Corp, Zurich Lab, CH-8803 Ruschlikon, Switzerland

来源：

2012 IEEE SENSORS PROCEEDINGS | 2012年

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The abrupt switching characteristic of nano-electromechanical (NEM) switch devices is an attractive characteristic to design energy-efficient circuits. In this paper we report the optimization of an in-plane curved cantilever switch geometry for high robustness and low switching energy. The scaling potential has been evaluated, showing that sub-100 aJ switching energy is possible. The curved cantilever design has been validated experimentally with good electrical characteristics and high mechanical robustness.

引用

页码：970 / 972

页数：3