Laser-induced resonant excitation of ethylene molecules in C2H4/C2H2/O2 reactions to enhance diamond deposition

被引：8

作者：

Ling, H. ^{[1
]}

Sun, J. ^{[1
]}

Han, Y. X. ^{[1
]}

Gebre, T. ^{[1
]}

Xie, Z. Q. ^{[1
]}

Zhao, M. ^{[1
]}

Lu, Y. F. ^{[1
]}

机构：

[1] Univ Nebraska, Dept Elect Engn, Lincoln, NE 68588 USA

来源：

JOURNAL OF APPLIED PHYSICS | 2009年 / 105卷 / 01期

关键词：

CHEMICAL-VAPOR-DEPOSITION; LOW-PRESSURE; FILM GROWTH; PLASMA; NUCLEATION;

D O I：

10.1063/1.2986217

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Vibrational resonant excitation of ethylene (C2H4) molecules using a carbon dioxide laser was employed to promote reactions in precursors of ethylene, acetylene (C2H2), and oxygen to enhance diamond deposition. One of the vibrational modes (CH2 wag mode, upsilon(7)) of the C2H4 molecules was selected to achieve the resonant excitation in the reactions. Optical emission spectroscopy was used to study the effects of laser resonant excitation on the reactions for diamond deposition. The optical emissions of CH and C-2 species were enhanced with the laser excitation, indicating that there are more active species generated in the reactions. Thicknesses and grain sizes of the deposited films were increased correspondingly. Temperature calculations from the line set in the R-branch of CH emission spectra indicated that a nonthermal process is involved in the enhanced diamond deposition. (C) 2009 American Institute of Physics. [DOI: 10.1063/1.2986217]

引用

页数：5

共 30 条

[1] Enlargement of the diamond deposition area in combustion flame method by traversing substrate [J].