共 50 条
- [1] DIFFUSION OF AU THROUGH A FILM OF SIO2 SOVIET PHYSICS SEMICONDUCTORS-USSR, 1968, 2 (05): : 615 - &
- [2] Environmental effects on Cu/SiO2 and Cu/Ti/SiO2 thin film adhesion MATERIALS RELIABILITY IN MICROELECTRONICS IX, 1999, 563 : 269 - 274
- [3] Behavior of Ta thin film as a diffusion barrier in the Cu/barrier/SiO2 system ADVANCED MICROELECTRONIC PROCESSING TECHNIQUES, 2000, 4227 : 133 - 137
- [4] Laser lateral crystallization of thin Au and Cu films on SiO2 THIN FILMS STRESSES AND MECHANICAL PROPERTIES XI, 2005, 875 : 207 - 212
- [6] Disorder in Au and Cu nanocrystals formed by ion implantation into thin SiO2 NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2005, 238 (1-4): : 285 - 289
- [8] Application of thin nanocrystalline VN film as a high-performance diffusion barrier between Cu and SiO2 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2004, 22 (05): : 2542 - 2547
- [9] Formation of microstructure in SiO2 thin film by a femtosecond laser pulse JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2002, 41 (6B): : 4400 - 4403
- [10] Formation of microstructure in SiO2 thin film by a femtosecond laser pulse Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 2002, 41 (6 B): : 4400 - 4403