High resolution electron backscatter diffraction with a field emission gun scanning electron microscope

被引：0

作者：

Humphreys, FJ ^{[1
]}

Brough, I ^{[1
]}

机构：

[1] Manchester Mat Sci Ctr, Manchester M1 7HS, Lancs, England

来源：

JOURNAL OF MICROSCOPY-OXFORD | 1999年 / 195卷

关键词：

angular accuracy; angular resolution; EBSD; electron backscatter diffraction; FEGSEM; SEM; spatial resolution; high resolution;

D O I：

暂无

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

A scanning electron microscope with a thermal field emission gun (FEGSEM) is found to offer significant improvements in electron backscatter diffraction performance over a conventional W-filament scanning microscope. The spatial resolution is improved by a factor of approximate to 3 in the FEGSEM and is optimized at probe currents of 50-300 nA and at 10-15 keV. The angular accuracy is optimized at probe currents above approximate to 150 nA and at 30 keV.

引用

页码：6 / 9

页数：4

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