Enhanced dielectric and tunable characteristics of K-doped Ba0.5Sr0.5TiO3 thin films prepared by pulsed laser deposition

被引:19
作者
Sekhar, Koppole C. [1 ]
Hong, Kyung Pyo [1 ]
Key, Sung Hun [1 ]
Han, Chan Su [1 ]
Kim, Jun Chul [2 ]
Kim, Dong Soo [2 ]
Park, Jong Chul [2 ]
Cho, Yong Soo [1 ]
机构
[1] Yonsei Univ, Dept Mat Sci & Engn, Seoul 120749, South Korea
[2] Korea Elect Technol Inst, Packaging Res Ctr, Gyeonggi Do 463816, South Korea
基金
新加坡国家研究基金会;
关键词
Dielectric films; Thin films; Tunability; Barium strontium titanate; Pulsed laser deposition; Doping; SOL-GEL; ELECTRIC-FIELD; SRTIO3; GROWTH; MGO;
D O I
10.1016/j.tsf.2012.11.012
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A series of potassium-doped barium strontium titanate ((Ba0.5Sr0.5)(1-x)KxTiO3) targets with dopant concentration (x) from 0 to 12.5 mol% were synthesized by solid state reaction and the corresponding thin films were fabricated on (111) Pt/Ti/SiO2/Si substrate by using pulsed laser deposition. The doping of K shows strong influences on structural, dielectric and tunable characteristics. Surface roughness of the films decreases with the doping of K up to 7.5 mol% and then increases with further increase of K, whereas the grain size is found to be minimum at 7.5% K. The maximum values of tunability and figure of merit obtained for the optimum 7.5 mol% K-doped thin films are 77% and 65 at an applied field of 400 kV/cm at 100 kHz, respectively, which corresponds to significant improvements compared to the reported results processed by sol-gel or sputtering. The relaxation of crystalline strain inside the grains, and smoother surface with smaller grains are assumed to be responsible for the improved tunability and lower dielectric loss. (C) 2012 Elsevier B. V. All rights reserved.
引用
收藏
页码:267 / 272
页数:6
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