The molecular beam epitaxial growth of InSb on (111)B GaAs

被引:16
作者
Michel, E [1 ]
Kim, JD [1 ]
Javadpour, S [1 ]
Xu, J [1 ]
Ferguson, I [1 ]
Razeghi, M [1 ]
机构
[1] NORTHWESTERN UNIV,DEPT ELECT ENGN & COMP SCI,CTR QUANTUM DEVICES,EVANSTON,IL 60201
关键词
D O I
10.1063/1.117376
中图分类号
O59 [应用物理学];
学科分类号
摘要
The molecular beam epitaxial growth of InSb on (111)B GaAs has been investigated. It was found that for a given Sb/In ratio, a higher growth temperature was required for the growth of InSb on (111)B GaAs compared to that on (001) GaAs. This difference has been attributed to the bonding characteristics of the (111)B and (001) surface. Once growth had been optimized, it was found that the material characteristics of (111)B InSb were almost identical to that of (001) InSb, i.e., independent of orientation. For example, the x-ray full width at half-maximum and 300 K mobility had the same absolute values for (111) InSb and (001)InSb and followed the same dependence with the sample thickness. Te was found to be a well-behaved n-type dopant for (111)B InSb. (C) 1996 American Institute of Physics.
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页码:215 / 217
页数:3
相关论文
共 13 条
[1]   SURFACE PASSIVATION OF BACKSIDE-ILLUMINATED INDIUM-ANTIMONIDE FOCAL PLANE ARRAY [J].
BLOOM, I ;
NEMIROVSKY, Y .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1993, 40 (02) :309-314
[2]  
CHIN A, 1994, APPL PHYS LETT, V65, P3338
[3]   THE MOLECULAR-BEAM EPITAXIAL-GROWTH OF INAS ON GAAS(111)B-ORIENTED AND (100)-ORIENTED SUBSTRATES - A COMPARATIVE GROWTH STUDY [J].
HOOPER, SE ;
WESTWOOD, DI ;
WOOLF, DA ;
HEGHOYAN, SS ;
WILLIAMS, RH .
SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 1993, 8 (06) :1069-1074
[4]   EPITAXIAL-GROWTH OF INSB (111) ON SAPPHIRE (0001) [J].
JAMISON, KD ;
BENSAOULA, A ;
IGNATIEV, A ;
HUANG, CF ;
CHAN, WS .
APPLIED PHYSICS LETTERS, 1989, 54 (19) :1916-1917
[5]   GROWTH AND CHARACTERIZATION OF MBE-GROWN THIN-FILMS OF INSB ON SI [J].
LU, HC ;
FETTERMAN, HR ;
CHEN, CJ ;
HSU, C ;
CHEN, TM .
SOLID-STATE ELECTRONICS, 1993, 36 (04) :533-538
[6]   MOLECULAR-BEAM EPITAXIAL-GROWTH OF HIGH-QUALITY INSB [J].
MICHEL, E ;
SINGH, G ;
SLIVKEN, S ;
BESIKCI, C ;
BOVE, P ;
FERGUSON, I ;
RAZEGHI, M .
APPLIED PHYSICS LETTERS, 1994, 65 (26) :3338-3340
[7]  
MICHEL E, 1995, P SOC PHOTO-OPT INS, V2397, P379, DOI 10.1117/12.206888
[8]  
MICHEL E, 1966, IEEE PHOTONIC TECH L, V8, P673
[9]   GROWTH OF SB AND INSB BY MOLECULAR-BEAM EPITAXY [J].
NOREIKA, AJ ;
FRANCOMBE, MH ;
WOOD, CEC .
JOURNAL OF APPLIED PHYSICS, 1981, 52 (12) :7416-7420
[10]   ORIENTATION DEPENDENCE OF THE SI DOPING OF GAAS GROWN BY MOLECULAR-BEAM EPITAXY [J].
PAVESI, L ;
PIAZZA, F ;
HENINI, M ;
HARRISON, I .
SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 1993, 8 (02) :167-171