14N(α,p)17O nuclear reaction cross-section at 4.9-6.1 MeV

被引:1
作者
Della Mea, G
Patelli, A
Restello, S
Rigato, V
Vomiero, A
机构
[1] Ist Nazl Fis Nucl, Lab Nazl Legnaro, I-35020 Legnaro, PD, Italy
[2] Univ Trent, Dipartimento Ingn Mat, I-38050 Trento, Italy
[3] Univ Padua, Dipartimento Ingn Informaz, I-35131 Padua, Italy
[4] Univ Padua, Dipartimento Fis, I-35131 Padua, Italy
关键词
N-14(alpha; p)O-17; cross-section; nitrogen depth profiling;
D O I
10.1016/j.nimb.2005.06.213
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
The N-14(alpha,p)O-17 nuclear reaction cross-section was measured in the energy range 4.9-6.1 MeV at the laboratory angle theta = 172 degrees in order to apply ion beam analysis to the detection of N in metal oxynitride layers. Comparison between the new calculation and data in literature was performed, highlighting important discrepancies between the new results and old cross-section data. Application of the new calculations to a standard TiN film suggests improved accuracy for the data in the present work. (c) 2005 Elsevier B.V. All rights reserved.
引用
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页码:803 / 809
页数:7
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