IZO deposition by RF and DC sputtering on paper and application on flexible electrochromic devices

被引：30

作者：

Gomes, Lucia ^{[3
]}

Marques, Ana ^{[3
]}

Branco, Aida ^{[3
]}

Araujo, Jorge ^{[3
]}

Simoes, Mario ^{[3
]}

Cardoso, Susana ^{[4
,5
]}

Silva, Fernando ^{[4
,5
]}

Henriques, Ines ^{[3
]}

Laia, Cesar A. T. ^{[2
]}

Costa, Claudia ^{[1
,2
]}

机构：

[1] YDreams, P-2825149 Caparica, Portugal

[2] Univ Nova Lisboa, Fac Ciencias & Tecnol, Dept Quim, P-2829516 Caparica, Portugal

[3] 2070 104 Cartaxo, Yrvisible, P-2070104 Cartaxo, Portugal

[4] INESC MN, P-1000029 Lisbon, Portugal

[5] Inst Nanociencia & Nanotechnol IN, P-1000029 Lisbon, Portugal

来源：

DISPLAYS | 2013年 / 34卷 / 04期

关键词：

RF sputtering; DC sputtering; Paper; IZO; Screen-printing; PEDOT:PSS; OXIDE; GEL;

D O I：

10.1016/j.displa.2013.06.004

中图分类号：

TP3 [计算技术、计算机技术];

学科分类号：

0812 ;

摘要：

The present work describes indium-zinc oxide (IZO) sputtering depositions onto several types of papers, using radio-frequency (RF) and direct current (DC) sputtering with a ceramic IZO target. The electrical and optical properties of the resulting materials were optimized; by studying the argon and oxygen gas flow rates and the sputtering power effects. At optimal deposition conditions, thin films of IZO were achieved with a low sheet resistance (about 20 Omega/sq) and an optical transmittance of ca. 80% in the visible spectrum range. These materials retained these properties for more than 8 months. Electrochromic devices (ECDs) with several configurations were built with those conductive papers and life cycling and contrast were measured for the ECDs. These devices exhibited a very good color contrast (as defined using L*a*b* color coordinates, = 32) and electrochromic cyclability up to 30,000 redox cycles. (C) 2013 Elsevier B.V. All rights reserved.

引用

页码：326 / 333

页数：8

共 14 条

[1] Navigating the Color Palette of Solution-Processable Electrochromic Polymers [J].