Fabrication of CuSiC metal matrix composites

被引:61
作者
Sundberg, G [1 ]
Paul, P
Sung, CM
Vasilos, T
机构
[1] Univ Massachusetts, Ctr Adv Mat, Dept Chem & Nucl Engn, Lowell, MA 01854 USA
[2] Univ Massachusetts, Dept Engn Technol, Lowell, MA USA
关键词
D O I
10.1007/s10853-005-2622-3
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A CuSiC MMC heatspreader will offer high thermal conductivity between 250 and 325 W/mK and corresponding adjustable thermal expansion coefficient between 8.0 and 12.5 ppm/degrees C. The primary challenge of CuSiC manufacture was to prevent reaction between copper and silicon carbide during high temperature densification, which dramatically degraded the thermal conductivity. In this study, the key issue addressed was the Si attack of Cu at the temperatures necessary for CuSiC fabrication (850 to 1200 degrees C). Decomposition of SiC in contact with copper will dissolve Si in Cu causing a dramatic decrease of Cu thermal conductivity. This diffusion of Si into Cu can be prevented by the application of reliable barrier layers to diminish mass transport through the diffusion path and thereby minimizing the chemical interaction. A reliable barrier coating was identified and used to fabricate the CuSiC composites, The CuSiC composites were then characterized by SEM, TEM, XRD and XPS. Chemical analysis and thermal conductivity by laser flash diffusivity measurement illustrated the effectiveness of the barriers. A CuSiC composite having thermal conductivity of 322.9 W/m-K was successfully fabricated. (c) 2006 Springer Science + Business Media, Inc.
引用
收藏
页码:485 / 504
页数:20
相关论文
共 20 条
[1]  
[Anonymous], 1974, Statistical Analysis of Spatial Dispersion, The Quadrat Method
[2]   THE INTERRELATIONS OF CERTAIN ANALYTIC AND SYNTHETIC PHYTOSOCIOLOGICAL CHARACTERS [J].
CURTIS, JT ;
MCINTOSH, RP .
ECOLOGY, 1950, 31 (03) :434-455
[3]  
CWAJNA J, 1992, ACTA STEREOL, V11, P431
[4]  
DeHoff R., 1968, QUANTITATIVE MICROSC
[5]   THE USE OF RANDOM AND CONTIGUOUS QUADRATS IN THE STUDY OF THE STRUCTURE OF PLANT COMMUNITIES [J].
GREIGSMITH, P .
ANNALS OF BOTANY, 1952, 16 (62) :293-316
[6]   STEREOLOGICAL ESTIMATION OF THE RADIAL-DISTRIBUTION FUNCTION OF CENTERS OF SPHERES [J].
HANISCH, KH ;
STOYAN, D .
JOURNAL OF MICROSCOPY-OXFORD, 1981, 122 (MAY) :131-141
[7]  
KARLSSON LM, P 4 INT C STERMAT 94, P249
[8]   Characterization of reinforcement distribution in cast Al-alloy/SiCp composites [J].
Karnezis, PA ;
Durrant, G ;
Cantor, B .
MATERIALS CHARACTERIZATION, 1998, 40 (02) :97-109
[9]   TANTALUM-BASED DIFFUSION-BARRIERS IN SI/CU VLSI METALLIZATIONS [J].
KOLAWA, E ;
CHEN, JS ;
REID, JS ;
POKELA, PJ ;
NICOLET, MA .
JOURNAL OF APPLIED PHYSICS, 1991, 70 (03) :1369-1373
[10]  
Kurzydlowski K.J., 1995, Quantitative Description of the Microstructure of Materials