共 50 条
[42]
Effect of substrate position on Structural, Morphological, and Optical properties of reactively sputtered ZnO thin films
[J].
2016 13TH INTERNATIONAL CONFERENCE ON ELECTRICAL ENGINEERING, COMPUTING SCIENCE AND AUTOMATIC CONTROL (CCE),
2016,
[47]
Substrate temperature influence on the properties of GaN thin films grown by hollow-cathode plasma-assisted atomic layer deposition
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A,
2016, 34 (01)
[49]
Atomic layer deposition of high purity Ga2O3 films using liquid pentamethylcyclopentadienyl gallium and combinations of H2O and O2 plasma
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A,
2020, 38 (02)