A novel electrostatic micro-actuator class and its application potential for optical MEMS

被引：0

作者：

Schenk, H. ^{[1
,2
]}

Conrad, H. ^{[1
]}

Gaudet, M. ^{[1
]}

Uhlig, S. ^{[1
]}

Kaiser, B. ^{[1
]}

Langa, S. ^{[1
]}

Stolz, M. ^{[1
]}

Schimmanz, K. ^{[1
,2
]}

机构：

[1] Fraunhofer Inst Photon Microsyst, Dresden, Germany

[2] Brandenburg Tech Univ Cottbus, Chair Micro & Nanosyst, Cottbus, Germany

来源：

2016 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN) | 2016年

关键词：

micro actuator; electrostatic actuator; pull-in; MEMS; MOEMS;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Electrostatic actuation is highly efficient at micro and nanoscale. However, due to pull-in instability large deflection requires large electrode separation and thus large driving voltages. We report on a novel electrostatic actuator class, which allows deflections in the mu m-range based on electrode separations of a few 100 nm, only. Specifically designed and fabricated actuators allow for a large variety of motion patterns including out-of-plane and in-plane motion as well as membrane deformation. A CMOS compatible and RoHs compliant fabrication process enable straight-forward integration. The potential for actuator based Optical MEMS devices is discussed.

引用

页数：2

共 49 条

[31] Advanced Micro-Actuator/Robot Fabrication Using Ultrafast Laser Direct Writing and Its Remote Control
Koo, Sangmo
[J]. APPLIED SCIENCES-BASEL, 2020, 10 (23): : 1 - 21
[32] Progress on femtosecond laser-based system-materials: three-dimensional monolithic electrostatic micro-actuator for optomechanics
Yang, Tao
Bellouard, Yves
[J]. FRONTIERS IN ULTRAFAST OPTICS: BIOMEDICAL, SCIENTIFIC, AND INDUSTRIAL APPLICATIONS XVI, 2016, 9740
[33] Indirect Adaptive Neural Network Dynamic Surface Control for Uncertain Time-delay Electrostatic Micro-actuator with State Constraint
Wu Xiaojing
Wu Xueli
Luo Xiaoyuan
[J]. 2015 34TH CHINESE CONTROL CONFERENCE (CCC), 2015, : 687 - 692
[34] Analysis of nonlinear vibration and instability of electrostatic functionally graded micro-actuator based on nonlocal strain gradient theory considering thickness effect
Van Hieu, Dang
Chan, Do Quang
Phi, Bui Gia
[J]. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2022, 28 (08): : 1845 - 1865
[35] Novel MEMS electrothermal actuators & its application
Pandiyan, J
Balachandar, S
Ramaswamy, S
Arumugam, M
Umapathy, M
[J]. INDICON 2005 Proceedings, 2005, : 123 - 126
[36] Neural-network-based controller with application to a flexible micro-actuator direct neural controller and its extension to an open-loop neural controller
Takahashi, K
Sasaki, M
[J]. IEICE TRANSACTIONS ON ELECTRONICS, 1997, E80C (02) : 246 - 254
[37] Highly space-efficient electrostatic zigzag transmissive micro-optic switches for an integrated MEMS optical display system
Wang, KW
Böhringer, KF
Sinclair, M
Starkweather, G
[J]. BOSTON TRANSDUCERS'03: DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 2003, : 572 - 575
[38] A Novel Approach to Fabricate Glass Micro-objects for MEMS Application
Chen, Boyin
Shang, Jintang
Zhang, Di
Xu, Chao
Liu, Junwen
Luo, Xinhu
Yu, Hui
Liu, Jingdong
[J]. 2010 11TH INTERNATIONAL CONFERENCE ON ELECTRONIC PACKAGING TECHNOLOGY & HIGH DENSITY PACKAGING (ICEPT-HDP), 2010, : 916 - 920
[39] An electro-thermal micro-actuator based on polymer composite for application to dual-stage positioning systems of hard disk drives
Yang, J. P.
Lau, G. K.
Tan, C. P.
Chong, N. B.
Thubthimthong, B.
He, Z. M.
[J]. SENSORS AND ACTUATORS A-PHYSICAL, 2012, 187 : 98 - 104
[40] Electrostatic Fringing-Field Actuator (EFFA): Application towards a low-complexity RF-MEMS technology
Rottenberg, X.
Nolmans, P.
Ekkels, P.
Czarnecki, P.
Mertens, R. P.
Nauwelaers, B.
De Wolf, I.
De Raedt, W.
Tilmans, H. A. C.
[J]. PROCEEDINGS OF THE IEEE TWENTIETH ANNUAL INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, VOLS 1 AND 2, 2007, : 558 - +

← 1 2 3 4 5 →