A novel electrostatic micro-actuator class and its application potential for optical MEMS

被引：0

作者：

Schenk, H. ^{[1
,2
]}

Conrad, H. ^{[1
]}

Gaudet, M. ^{[1
]}

Uhlig, S. ^{[1
]}

Kaiser, B. ^{[1
]}

Langa, S. ^{[1
]}

Stolz, M. ^{[1
]}

Schimmanz, K. ^{[1
,2
]}

机构：

[1] Fraunhofer Inst Photon Microsyst, Dresden, Germany

[2] Brandenburg Tech Univ Cottbus, Chair Micro & Nanosyst, Cottbus, Germany

来源：

2016 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN) | 2016年

关键词：

micro actuator; electrostatic actuator; pull-in; MEMS; MOEMS;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Electrostatic actuation is highly efficient at micro and nanoscale. However, due to pull-in instability large deflection requires large electrode separation and thus large driving voltages. We report on a novel electrostatic actuator class, which allows deflections in the mu m-range based on electrode separations of a few 100 nm, only. Specifically designed and fabricated actuators allow for a large variety of motion patterns including out-of-plane and in-plane motion as well as membrane deformation. A CMOS compatible and RoHs compliant fabrication process enable straight-forward integration. The potential for actuator based Optical MEMS devices is discussed.

引用

页数：2

共 49 条

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