Method for Retrieval of the Three-Dimensional Object Potential by Inversion of Dynamical Electron Scattering

被引:50
作者
Van den Broek, Wouter [1 ]
Koch, Christoph T. [1 ]
机构
[1] Univ Ulm, Inst Expt Phys, D-89081 Ulm, Germany
关键词
BEAM LATTICE IMAGES; PHASE; CONTRAST; RECONSTRUCTION; MICROSCOPY;
D O I
10.1103/PhysRevLett.109.245502
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
Dynamical scattering of fast electrons can be inverted by recasting the multislice algorithm as an artificial neural network, enabling the iterative retrieval of the three-dimensional object potential. This allows a nonheuristic treatment of the modulation transfer function of the CCD, partial spatial and temporal coherence, and inelastic scattering through an absorptive potential. Furthermore, prior knowledge about the atomic potential shape and the sparseness and positivity of the object can be used. The method is demonstrated on simulated bright field images recorded at 40 kV.
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页数:5
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共 34 条
[1]   BEAM LATTICE IMAGES .1. EXPERIMENTAL AND COMPUTED IMAGES FROM W4NB26O77 [J].
ALLPRESS, JG ;
HEWAT, EA ;
MOODIE, AF ;
SANDERS, JV .
ACTA CRYSTALLOGRAPHICA SECTION A, 1972, A 28 (NOV1) :528-536
[2]   CRYSTALLOGRAPHY IN THE CONVENTIONAL ELECTRON-MICROSCOPE - MOVING BETWEEN DIRECT AND RECIPROCAL SPACE [J].
AMELINCKX, S .
ACTA CRYSTALLOGRAPHICA SECTION B-STRUCTURAL SCIENCE, 1995, 51 :486-501
[3]  
[Anonymous], 1999, SPRINGER SCI
[4]   Maximum-likelihood method for focus-variation image reconstruction in high resolution transmission electron microscopy [J].
Coene, WMJ ;
Thust, A ;
deBeeck, M ;
VanDyck, D .
ULTRAMICROSCOPY, 1996, 64 (1-4) :109-135
[5]   THE SCATTERING OF ELECTRONS BY ATOMS AND CRYSTALS .1. A NEW THEORETICAL APPROACH [J].
COWLEY, JM ;
MOODIE, AF .
ACTA CRYSTALLOGRAPHICA, 1957, 10 (10) :609-619
[6]   PERFORMANCE OF ELECTRON IMAGE CONVERTERS WITH YAG SINGLE-CRYSTAL SCREEN AND CCD SENSOR [J].
DABERKOW, I ;
HERRMANN, KH ;
LIU, LB ;
RAU, WD .
ULTRAMICROSCOPY, 1991, 38 (3-4) :215-223
[7]   PHASE RETRIEVAL ALGORITHMS - A COMPARISON [J].
FIENUP, JR .
APPLIED OPTICS, 1982, 21 (15) :2758-2769
[8]   Submicron imaging of buried integrated circuit structures using scanning confocal electron microscopy [J].
Frigo, SP ;
Levine, ZH ;
Zaluzec, NJ .
APPLIED PHYSICS LETTERS, 2002, 81 (11) :2112-2114
[9]   NUMERICAL EVALUATION OF N-BEAM WAVE-FUNCTIONS IN ELECTRON-SCATTERING BY MULTI-SLICE METHOD [J].
GOODMAN, P ;
MOODIE, AF .
ACTA CRYSTALLOGRAPHICA SECTION A, 1974, A 30 (MAR) :280-290
[10]  
Graef M.D., 2003, Introduction to Conventional Transmission Electron Microscopy