Analysis of vacuum-degree limit of plane circular high-vacuum gas-bearing

被引：0

作者：

Li, Lu Jun ^{[1
]}

Zhang, Ming ^{[1
]}

Zhu, Yu ^{[1
]}

Hu, Jin Chun ^{[1
]}

机构：

[1] Tsinghua Univ, State Key Lab Tribol, Dept Precis Instruments & Mechanol, Beijing 100084, Peoples R China

来源：

MATERIALS, MECHATRONICS AND AUTOMATION, PTS 1-3 | 2011年 / 467-469卷

关键词：

gas-bearing; high-vacuum; leakage; seal-system;

D O I：

10.4028/www.scientific.net/KEM.467-469.940

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

This paper studied a one-dimensional model of high-vacuum plane circular gas-bearing with a three-stage sealing system, and analyzed the performances of the high-vacuum gas-bearing by combining the finite element method and the flow rate principle of the vacuum technology. For an expected pressure in the vacuum chamber, the zero load-capacity accident could take place. The reasons for the zero load-capacity accident were given through analyzing the flow rate of each sealing stage while the relationship between the pressure in the vacuum chamber and the inlet pressure was obtained. Besides, the influences of many parameters on the vacuum degree limit of the vacuum chamber were examined carefully. The analysis in this paper showed that for a given multi-stage seal system, the vacuum degree limit of the vacuum-chamber was inherent at the nonzero load-capacity condition.

引用

页码：940 / 949

页数：10

共 14 条

[1] Gao B H, 1983, VACUUM PHYS
[2] HIGUCHI A, 2003, Patent No. 6510755
[3] A vacuum-compatible air bearing: Design analysis and optimization
Khim, G. H.
Park, C. H.
Lee, H. S.
Kim, S. W.
[J]. PROGRESS OF PRECISION ENGINEERING AND NANO TECHNOLOGY, 2007, 339 : 37 - +
[4] INFLUENCE OF MOLECULAR MEAN FREE PATH IN GAS-LUBRICATED THRUST BEARINGS
RAMANAIAH, G
[J]. WEAR, 1969, 14 (03) : 193 - +
[5] Roth A., 1982, VACUUM TECHNOLOGY, VSecond, pxiv+532
[6] Comparison between flat aerostatic gas-bearing pads with orifice and porous feedings at high-vacuum conditions
Schenk, Christoph
Buschmann, Stefan
Risse, Stefan
Eberhardt, Ramona
Tuennermann, Andreas
[J]. PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, 2008, 32 (04): : 319 - 328
[7] Shigehisa F., 1988, J TRIBOLOGY, V110, P253
[8] Shigehisa F., 1987, JSME INT J, V30, P1660
[9] Shinohara S., 2003, U.S. Patent, Patent No. [0, 002, 756, 0002756]
[10] SOGARD MR, 2000, Patent No. 6126169

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