Full field X-ray nano-imaging at SSRF

被引:1
作者
Deng, Biao [1 ]
Ren, Yuqi [1 ]
Wang, Yudan [1 ]
Du, Guohao [1 ]
Xie, Honglan [1 ]
Xiao, Tiqiao [1 ]
机构
[1] Chinese Acad Sci, Shanghai Inst Appl Phys, Shanghai, Peoples R China
来源
X-RAY NANOIMAGING: INSTRUMENTS AND METHODS | 2013年 / 8851卷
关键词
Full field X-ray nano-imaging; Synchrotron radiation; Beam shaper; OXIDE FUEL-CELL;
D O I
10.1117/12.2035589
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Full field X-ray nano-imaging focusing on material science is under developing at SSRF. A dedicated full field X-ray nano-imaging beamline based on bending magnet will be built in the SSRF phase-II project. The beamline aims at the 3D imaging of the nano-scale inner structures. The photon energy range is of 5-14keV. The design goals with the field of view (FOV) of 20 mu m and a spatial resolution of 20nm are proposed at 8 keV, taking a Fresnel zone plate (FZP) with outermost zone width of 25 nm. Futhermore, an X-ray nano-imaging microscope is under developing at the SSRF BL13W beamline, in which a larger FOV will be emphasized. This microscope is based on a beam shaper and a zone plate using both absorption contrast and Zernike phase contrast, with the optimized energy set to 10keV. The detailed design and the progress of the project will be introduced.
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页数:6
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