Curved Structure of Si by Improving Etching Direction Controllability in Magnetically Guided Metal-Assisted Chemical Etching
被引:5
作者:
Kim, Tae Kyoung
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机构:
Univ Calif San Diego, Mat Sci & Engn, 9500 Gilman Dr, La Jolla, CA 92093 USAUniv Calif San Diego, Mat Sci & Engn, 9500 Gilman Dr, La Jolla, CA 92093 USA
Kim, Tae Kyoung
[1
]
Bae, Jee-Hwan
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机构:
Korea Inst Sci & Technol KIST, Adv Anal Ctr, Seoul 02792, South KoreaUniv Calif San Diego, Mat Sci & Engn, 9500 Gilman Dr, La Jolla, CA 92093 USA
Bae, Jee-Hwan
[2
]
Kim, Juyoung
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h-index: 0
机构:
Korea Inst Sci & Technol KIST, Adv Anal Ctr, Seoul 02792, South KoreaUniv Calif San Diego, Mat Sci & Engn, 9500 Gilman Dr, La Jolla, CA 92093 USA
Kim, Juyoung
[2
]
Cho, Min Kyung
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h-index: 0
机构:
Korea Inst Sci & Technol KIST, Adv Anal Ctr, Seoul 02792, South KoreaUniv Calif San Diego, Mat Sci & Engn, 9500 Gilman Dr, La Jolla, CA 92093 USA
Cho, Min Kyung
[2
]
Kim, Yu-Chan
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机构:
Korea Inst Sci & Technol KIST, Biomed Res Inst, Ctr Biomat, Seoul 02792, South KoreaUniv Calif San Diego, Mat Sci & Engn, 9500 Gilman Dr, La Jolla, CA 92093 USA
Kim, Yu-Chan
[3
]
Jin, Sungho
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机构:
Univ Calif San Diego, Mat Sci & Engn, 9500 Gilman Dr, La Jolla, CA 92093 USAUniv Calif San Diego, Mat Sci & Engn, 9500 Gilman Dr, La Jolla, CA 92093 USA
Jin, Sungho
[1
]
Chun, Dongwon
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机构:
Korea Inst Sci & Technol KIST, Adv Anal Ctr, Seoul 02792, South KoreaUniv Calif San Diego, Mat Sci & Engn, 9500 Gilman Dr, La Jolla, CA 92093 USA
Chun, Dongwon
[2
]
机构:
[1] Univ Calif San Diego, Mat Sci & Engn, 9500 Gilman Dr, La Jolla, CA 92093 USA
[2] Korea Inst Sci & Technol KIST, Adv Anal Ctr, Seoul 02792, South Korea
[3] Korea Inst Sci & Technol KIST, Biomed Res Inst, Ctr Biomat, Seoul 02792, South Korea
magnetically guided metal-assisted chemical etching;
bulk Si etching;
curved Si structure;
catalyst encapsulation;
SILICON NANOWIRES;
ANODES;
ARRAYS;
D O I:
10.3390/mi11080744
中图分类号:
O65 [分析化学];
学科分类号:
070302 ;
081704 ;
摘要:
Metal-assisted chemical etching (MACE) is widely used to fabricate micro-/nano-structured Si owing to its simplicity and cost-effectiveness. The technique of magnetically guided MACE, involving MACE with a tri-layer metal catalyst, was developed to improve etching speed as well as to adjust the etching direction using an external magnetic field. However, the controllability of the etching direction diminishes with an increase in the etching dimension, owing to the corrosion of Fe due to the etching solution; this impedes the wider application of this approach for the fabrication of complex micro Si structures. In this study, we modified a tri-layer metal catalyst (Au/Fe/Au), wherein the Fe layer was encapsulated to improve direction controllability; this improved controllability was achieved by protecting Fe against the corrosion caused by the etching solution. We demonstrated curved Si microgroove arrays via magnetically guided MACE with Fe encapsulated in the tri-layer catalyst. Furthermore, the curvature in the curved Si microarrays could be modulated via an external magnetic field, indicating that direction controllability could be maintained even for the magnetically guided MACE of bulk Si. The proposed fabrication method developed for producing curved Si microgroove arrays can be applied to electronic devices and micro-electromechanical systems.
机构:
Univ Calif San Diego, Mat Sci & Engn, 9500 Gilman Dr, La Jolla, CA 92093 USA
KIST, Biomat Ctr, Hwarang Ro 14 Gil, Seoul 02792, South KoreaUniv Calif San Diego, Mat Sci & Engn, 9500 Gilman Dr, La Jolla, CA 92093 USA
Chun, Dong Won
;
Kim, Tae Kyoung
论文数: 0引用数: 0
h-index: 0
机构:
Univ Calif San Diego, Mat Sci & Engn, 9500 Gilman Dr, La Jolla, CA 92093 USAUniv Calif San Diego, Mat Sci & Engn, 9500 Gilman Dr, La Jolla, CA 92093 USA
Kim, Tae Kyoung
;
Choi, Duyoung
论文数: 0引用数: 0
h-index: 0
机构:
Univ Calif San Diego, Mat Sci & Engn, 9500 Gilman Dr, La Jolla, CA 92093 USAUniv Calif San Diego, Mat Sci & Engn, 9500 Gilman Dr, La Jolla, CA 92093 USA
Choi, Duyoung
;
Caldwell, Elizabeth
论文数: 0引用数: 0
h-index: 0
机构:
Univ Calif San Diego, Mat Sci & Engn, 9500 Gilman Dr, La Jolla, CA 92093 USAUniv Calif San Diego, Mat Sci & Engn, 9500 Gilman Dr, La Jolla, CA 92093 USA
Caldwell, Elizabeth
;
Kim, Young Jin
论文数: 0引用数: 0
h-index: 0
机构:
Univ Calif San Diego, Mat Sci & Engn, 9500 Gilman Dr, La Jolla, CA 92093 USAUniv Calif San Diego, Mat Sci & Engn, 9500 Gilman Dr, La Jolla, CA 92093 USA
Kim, Young Jin
;
Paik, Jae Cheol
论文数: 0引用数: 0
h-index: 0
机构:
Samsung Elect Co, Hwaseong Si 445701, Gyeonggi Do, South KoreaUniv Calif San Diego, Mat Sci & Engn, 9500 Gilman Dr, La Jolla, CA 92093 USA
Paik, Jae Cheol
;
Jin, Sungho
论文数: 0引用数: 0
h-index: 0
机构:
Univ Calif San Diego, Mat Sci & Engn, 9500 Gilman Dr, La Jolla, CA 92093 USAUniv Calif San Diego, Mat Sci & Engn, 9500 Gilman Dr, La Jolla, CA 92093 USA
Jin, Sungho
;
Chen, Renkun
论文数: 0引用数: 0
h-index: 0
机构:
Univ Calif San Diego, Mat Sci & Engn, 9500 Gilman Dr, La Jolla, CA 92093 USA
Univ Calif San Diego, Mech & Aerosp Engn, 9500 Gilman Dr, La Jolla, CA 92093 USAUniv Calif San Diego, Mat Sci & Engn, 9500 Gilman Dr, La Jolla, CA 92093 USA
机构:
Chinese Acad Sci, Inst Microelect, Smart Sensing Res & Dev Ctr, Beijing 100029, Peoples R ChinaChinese Acad Sci, Inst Microelect, Smart Sensing Res & Dev Ctr, Beijing 100029, Peoples R China
Fu, Jianyu
;
Li, Junjie
论文数: 0引用数: 0
h-index: 0
机构:
Chinese Acad Sci, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R ChinaChinese Acad Sci, Inst Microelect, Smart Sensing Res & Dev Ctr, Beijing 100029, Peoples R China
Li, Junjie
;
Yu, Jiahan
论文数: 0引用数: 0
h-index: 0
机构:
Chinese Acad Sci, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R ChinaChinese Acad Sci, Inst Microelect, Smart Sensing Res & Dev Ctr, Beijing 100029, Peoples R China
Yu, Jiahan
;
Liu, Ruiwen
论文数: 0引用数: 0
h-index: 0
机构:
Chinese Acad Sci, Inst Microelect, Smart Sensing Res & Dev Ctr, Beijing 100029, Peoples R ChinaChinese Acad Sci, Inst Microelect, Smart Sensing Res & Dev Ctr, Beijing 100029, Peoples R China
Liu, Ruiwen
;
Li, Junfeng
论文数: 0引用数: 0
h-index: 0
机构:
Chinese Acad Sci, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R ChinaChinese Acad Sci, Inst Microelect, Smart Sensing Res & Dev Ctr, Beijing 100029, Peoples R China
Li, Junfeng
;
Wang, Weibing
论文数: 0引用数: 0
h-index: 0
机构:
Chinese Acad Sci, Inst Microelect, Smart Sensing Res & Dev Ctr, Beijing 100029, Peoples R ChinaChinese Acad Sci, Inst Microelect, Smart Sensing Res & Dev Ctr, Beijing 100029, Peoples R China
Wang, Weibing
;
Wang, Wenwu
论文数: 0引用数: 0
h-index: 0
机构:
Chinese Acad Sci, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R ChinaChinese Acad Sci, Inst Microelect, Smart Sensing Res & Dev Ctr, Beijing 100029, Peoples R China
Wang, Wenwu
;
Chen, Dapeng
论文数: 0引用数: 0
h-index: 0
机构:
Chinese Acad Sci, Inst Microelect, Smart Sensing Res & Dev Ctr, Beijing 100029, Peoples R ChinaChinese Acad Sci, Inst Microelect, Smart Sensing Res & Dev Ctr, Beijing 100029, Peoples R China
机构:
Univ Calif San Diego, Mat Sci & Engn, 9500 Gilman Dr, La Jolla, CA 92093 USA
KIST, Biomat Ctr, Hwarang Ro 14 Gil, Seoul 02792, South KoreaUniv Calif San Diego, Mat Sci & Engn, 9500 Gilman Dr, La Jolla, CA 92093 USA
Chun, Dong Won
;
Kim, Tae Kyoung
论文数: 0引用数: 0
h-index: 0
机构:
Univ Calif San Diego, Mat Sci & Engn, 9500 Gilman Dr, La Jolla, CA 92093 USAUniv Calif San Diego, Mat Sci & Engn, 9500 Gilman Dr, La Jolla, CA 92093 USA
Kim, Tae Kyoung
;
Choi, Duyoung
论文数: 0引用数: 0
h-index: 0
机构:
Univ Calif San Diego, Mat Sci & Engn, 9500 Gilman Dr, La Jolla, CA 92093 USAUniv Calif San Diego, Mat Sci & Engn, 9500 Gilman Dr, La Jolla, CA 92093 USA
Choi, Duyoung
;
Caldwell, Elizabeth
论文数: 0引用数: 0
h-index: 0
机构:
Univ Calif San Diego, Mat Sci & Engn, 9500 Gilman Dr, La Jolla, CA 92093 USAUniv Calif San Diego, Mat Sci & Engn, 9500 Gilman Dr, La Jolla, CA 92093 USA
Caldwell, Elizabeth
;
Kim, Young Jin
论文数: 0引用数: 0
h-index: 0
机构:
Univ Calif San Diego, Mat Sci & Engn, 9500 Gilman Dr, La Jolla, CA 92093 USAUniv Calif San Diego, Mat Sci & Engn, 9500 Gilman Dr, La Jolla, CA 92093 USA
Kim, Young Jin
;
Paik, Jae Cheol
论文数: 0引用数: 0
h-index: 0
机构:
Samsung Elect Co, Hwaseong Si 445701, Gyeonggi Do, South KoreaUniv Calif San Diego, Mat Sci & Engn, 9500 Gilman Dr, La Jolla, CA 92093 USA
Paik, Jae Cheol
;
Jin, Sungho
论文数: 0引用数: 0
h-index: 0
机构:
Univ Calif San Diego, Mat Sci & Engn, 9500 Gilman Dr, La Jolla, CA 92093 USAUniv Calif San Diego, Mat Sci & Engn, 9500 Gilman Dr, La Jolla, CA 92093 USA
Jin, Sungho
;
Chen, Renkun
论文数: 0引用数: 0
h-index: 0
机构:
Univ Calif San Diego, Mat Sci & Engn, 9500 Gilman Dr, La Jolla, CA 92093 USA
Univ Calif San Diego, Mech & Aerosp Engn, 9500 Gilman Dr, La Jolla, CA 92093 USAUniv Calif San Diego, Mat Sci & Engn, 9500 Gilman Dr, La Jolla, CA 92093 USA
机构:
Chinese Acad Sci, Inst Microelect, Smart Sensing Res & Dev Ctr, Beijing 100029, Peoples R ChinaChinese Acad Sci, Inst Microelect, Smart Sensing Res & Dev Ctr, Beijing 100029, Peoples R China
Fu, Jianyu
;
Li, Junjie
论文数: 0引用数: 0
h-index: 0
机构:
Chinese Acad Sci, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R ChinaChinese Acad Sci, Inst Microelect, Smart Sensing Res & Dev Ctr, Beijing 100029, Peoples R China
Li, Junjie
;
Yu, Jiahan
论文数: 0引用数: 0
h-index: 0
机构:
Chinese Acad Sci, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R ChinaChinese Acad Sci, Inst Microelect, Smart Sensing Res & Dev Ctr, Beijing 100029, Peoples R China
Yu, Jiahan
;
Liu, Ruiwen
论文数: 0引用数: 0
h-index: 0
机构:
Chinese Acad Sci, Inst Microelect, Smart Sensing Res & Dev Ctr, Beijing 100029, Peoples R ChinaChinese Acad Sci, Inst Microelect, Smart Sensing Res & Dev Ctr, Beijing 100029, Peoples R China
Liu, Ruiwen
;
Li, Junfeng
论文数: 0引用数: 0
h-index: 0
机构:
Chinese Acad Sci, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R ChinaChinese Acad Sci, Inst Microelect, Smart Sensing Res & Dev Ctr, Beijing 100029, Peoples R China
Li, Junfeng
;
Wang, Weibing
论文数: 0引用数: 0
h-index: 0
机构:
Chinese Acad Sci, Inst Microelect, Smart Sensing Res & Dev Ctr, Beijing 100029, Peoples R ChinaChinese Acad Sci, Inst Microelect, Smart Sensing Res & Dev Ctr, Beijing 100029, Peoples R China
Wang, Weibing
;
Wang, Wenwu
论文数: 0引用数: 0
h-index: 0
机构:
Chinese Acad Sci, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R ChinaChinese Acad Sci, Inst Microelect, Smart Sensing Res & Dev Ctr, Beijing 100029, Peoples R China
Wang, Wenwu
;
Chen, Dapeng
论文数: 0引用数: 0
h-index: 0
机构:
Chinese Acad Sci, Inst Microelect, Smart Sensing Res & Dev Ctr, Beijing 100029, Peoples R ChinaChinese Acad Sci, Inst Microelect, Smart Sensing Res & Dev Ctr, Beijing 100029, Peoples R China