Effective ionization coefficient in mixtures of Ar and O2 determined using the Townsend discharge

被引:7
作者
Talviste, Rasmus [1 ]
Erme, Kalev [1 ]
Paris, Peeter [1 ]
Raud, Jueri [1 ]
Plank, Toomas [1 ]
Jogi, Indrek [1 ]
机构
[1] Univ Tartu, Inst Phys, W Ostwaldi Str 1, Tartu 50411, Estonia
关键词
AR/O-2 PLASMA TREATMENT; ATTACHMENT COEFFICIENTS; SURFACE MODIFICATION; INTENSITY RATIO; GROWTH; INACTIVATION; NITROGEN; METHANE; BANDS; ARGON;
D O I
10.1063/5.0098014
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Precise knowledge of the fundamental ionization properties of gases, such as the effective ionization coefficient, is crucial for discharges in mixtures of Ar:O-2, which are significant for a wide range of plasma applications. This study determined the effective ionization coefficient in electronegative gas mixtures of Ar:O-2 in the pressure range of 10-800 Torr and reduced electric field strength E/N range of 40-1200 Td utilizing a steady-state non-self-sustaining Townsend discharge. The reduced effective ionization coefficient alpha(e)/N increased with E/N and decreased with increasing O-2 content in the gas mixture. The experimental results were compared with a model which was based on calculating the ionization and attachment coefficients with BOLSIG+. The ion conversion of O- to O-2(-), detachment from O-2(-), and formation of O-3 were accounted for similarly as has been done with N-2:O-2 mixtures. Reasonably good agreement between the measurements and the model calculations was achieved for Ar:O-2 mixtures with the O-2 content between 20% and 70%. A discrepancy of more than 20% between measurement and calculations was observed at low E/N values when the O-2 content was below 20% and at high E/N values when the O-2 content was above 70%. Several possible explanations were proposed for the observed discrepancy; however, more elaborate models are required. The reduced critical electric field E/N-crit, where the apparent effective ionization coefficient is zero, was determined as a function of the O-2 content in the Ar:O-2 mixtures. E/N-crit increased with increasing O-2 content in the mixture.
引用
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页数:10
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