Role of multiple shots of femtosecond laser pulses in periodic surface nanoablation

被引：26

作者：

Miyaji, Godai ^{[1
]}

Miyazaki, Kenzo ^{[1
]}

机构：

[1] Kyoto Univ, Adv Laser Sci Res Sect, Inst Adv Energy, Uji, Kyoto 6110011, Japan

来源：

APPLIED PHYSICS LETTERS | 2013年 / 103卷 / 07期

关键词：

TIME-RESOLVED REFLECTIVITY; CRYSTALLINE SILICON; RAMAN-SPECTROSCOPY; MICROCRYSTALLINE; FILMS;

D O I：

10.1063/1.4818818

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Using a pump and probe technique, we observed time-dependent change in reflectivity of crystalline silicon surface to study the dynamic process of periodic surface nanostructure formation in femtosecond (fs) laser ablation. The results have shown that multiple shots of low-fluence fs laser pulses play the crucial role in the non-thermal process for nanostructuring through the increasing bonding structure change to amorphous silicon and resulting decrease in the ablation threshold. (C) 2013 AIP Publishing LLC.

引用

页数：4

共 23 条

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