Highly ordered catalyst-free and mask-free GaN nanorods on r-plane sapphire

被引:28
作者
Aschenbrenner, T. [1 ]
Kruse, C. [1 ]
Kunert, G. [1 ]
Figge, S. [1 ]
Sebald, K. [1 ]
Kalden, J. [1 ]
Voss, T. [1 ]
Gutowski, J. [1 ]
Hommel, D. [1 ]
机构
[1] Univ Bremen, Inst Solid State Phys, D-28359 Bremen, Germany
关键词
CHEMICAL-VAPOR-DEPOSITION; MOLECULAR-BEAM EPITAXY; OPTICAL-PROPERTIES; MBE-GROWTH; NANOWIRES; DIODES;
D O I
10.1088/0957-4484/20/7/075604
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Self-organized and highly ordered GaN nanorods were grown without catalyst on r-plane sapphire using a combination of molecular beam epitaxy and metal-organic vapor-phase epitaxy. AlN nucleation centers for the nanorods were prepared by nitridation of the sapphire in a metal-organic vapor-phase epitaxy reactor, while the nanorods were grown by molecular beam epitaxy. A coalesced two-dimensional GaN layer was observed between the nanorods. The nanorods are inclined by 62 degrees towards the +/-[1 (1) over bar 00]-directions of the a-plane GaN layer. The high degree of ordering and the structural perfection were confirmed by micro-photoluminescence measurements.
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页数:5
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