Direct measurement of transient pulses induced by laser and heavy ion irradiation in deca-nanometer devices

被引:77
作者
Ferlet-Cavrois, V
Paillet, P
McMorrow, D
Torres, A
Gaillardin, M
Melinger, JS
Knudson, AR
Campbell, AB
Schwank, JR
Vizkelethy, G
Shaneyfelt, MR
Hirose, K
Faynot, O
Jahan, C
Tosti, L
机构
[1] CEA, DIF, F-91680 Bruyeres Le Chatel, France
[2] IMEP ENSERG, F-38016 Grenoble 1, France
[3] USN, Res Lab, Washington, DC 20375 USA
[4] Sandia Natl Labs, Albuquerque, NM 87185 USA
[5] Inst Space & Astronaut Sci, Kanagawa 2298510, Japan
[6] CEA LETI, F-38054 Grenoble 9, France
关键词
collected charge; heavy ion; pulsed laser; SOI and bulk transistors; transient current;
D O I
10.1109/TNS.2005.860682
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This paper investigates the transient response of 50-nm gate length fully and partially depleted SOI and bulk devices to pulsed laser and heavy ion microbeam irradiations. The measured transient signals on 50-nm fully depleted devices are very short, and the collected charge is small compared to older 0.25-mu m generation SOI and bulk devices. We analyze in detail the influence of the SOI architecture (fully or partially depleted) on the pulse duration and the amount of bipolar amplification. For bulk devices, the doping engineering is shown to have large effects on the duration of the transient signals and on the charge collection efficiency.
引用
收藏
页码:2104 / 2113
页数:10
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