Fabrication and electrical properties of LiNbO3/ZnO/n-Si heterojunction

被引:9
作者
Hao, Lanzhong [1 ]
Li, Yanrong [1 ]
Zhu, Jun [1 ]
Wu, Zhipeng [1 ]
Deng, Jie [1 ]
Liu, Xingzhao [1 ]
Zhang, Wanli [1 ]
机构
[1] Univ Elect Sci & Technol China, State Key Lab Elect Thin Films & Integrated Devic, Chengdu 610054, Peoples R China
来源
AIP ADVANCES | 2013年 / 3卷 / 04期
基金
美国国家科学基金会;
关键词
buffer layers; crystal microstructure; dielectric hysteresis; dielectric polarisation; ferroelectric thin films; II-VI semiconductors; lithium compounds; pulsed laser deposition; semiconductor heterojunctions; wide band gap semiconductors; X-ray diffraction; zinc compounds; LINBO3; THIN-FILM; LITHIUM-NIOBATE; SEMICONDUCTOR; BUFFER; LAYER; SI; INTEGRATION; CAPACITOR; SILICON; GROWTH;
D O I
10.1063/1.4800705
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Lithium niobate (LiNbO3 or LN) ferroelectric films were grown on n-type Si (100) substrates using ZnO as buffer layers by pulse laser deposition technique. The microstructures and electrical properties of the heterojunctions were studied. X-ray diffraction results showed that single (001) orientation for the LN films can be promoted on Si (100) substrates with the buffer effect of the ZnO layers. Due to the ferroelectric polarizations of the LN films, hysteretic characteristics were observed from the capacitance-voltage (C-V) curves of the LN/ZnO/n-Si heterojunctions. Obvious photoresponse characteristics were exhibited in the fabricated heterojunction. High performance of the photoresponse of the heterojunction was shown, such as a large ON/OFF ratio, short photoresponse time, steady ON or OFF states, and well reversible. These characteristics make it possible for the heterojunctions to develop multifunctional applications, such as memory devices, eletro-optic devices, and etc. The studied results show that the electrical properties of the heterojunctions were dependent greatly on the thickness of the ZnO buffers and the structural composition of the LN films. The results were discussed in terms of the band diagrams of the LN/ZnO/Si heterojunctions in this work. Copyright 2013 Author(s). All article content, except where otherwise noted, is licensed under a Creative Commons Attribution 3.0 Unported License. [http://dx.doi.org/10.1063/1.4800705]
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页数:15
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