3-D Modeling of Pyroelectric Sensor Arrays Part I: Multiphysics Finite-Element Simulation

被引:7
作者
Haeusler, Christoph [1 ]
Milde, Guenter [2 ]
Balke, Herbert [1 ]
Bahr, Hans-Achim [1 ]
Gerlach, Gerald [2 ]
机构
[1] Tech Univ Dresden, Inst Solid State Mech, D-01062 Dresden, Germany
[2] Tech Univ Dresden, Solid State Elect Lab, D-01062 Dresden, Germany
关键词
Finite-element method (FEM); infrared sensor array; pyroelectric sensor; sensor modeling; simulation;
D O I
10.1109/JSEN.2008.2007683
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
When modeling pyroelectric sensors, not all relevant and coupled physical phenomena could be considered contemporaneously up to now. We describe a method to examine problems with coupled thermal, electrical, and mechanical fields using finite-element software. Modeling the complex interaction between the physical fields is realized by implementing a two-step approach that takes advantage of the internal computational routines of finite-element programs. The method will be exemplified on a standard pyroelectric sensor array, whose efficient 3-D modeling and simulation is demonstrated using a public accessible commercial finite element software.
引用
收藏
页码:2080 / 2087
页数:8
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