Developments in THz Range Ellipsometry

被引:32
作者
Neshat, M. [1 ]
Armitage, N. P. [2 ]
机构
[1] Univ Tehran, Sch Elect & Comp Engn, Tehran, Iran
[2] Johns Hopkins Univ, Dept Phys & Astron, Baltimore, MD 21218 USA
关键词
Terahertz; Infrared optics; Ellipsometry; Materials characterization; INFRARED MAGNETOOPTIC ELLIPSOMETRY; DOMAIN SPECTROSCOPIC ELLIPSOMETRY; TERAHERTZ REFLECTION SPECTROSCOPY; ROTATING ELEMENT ELLIPSOMETERS; EFFECTIVE-MASS; DOPED SILICON; LIQUID WATER; THIN-FILMS; TIME; CALIBRATION;
D O I
10.1007/s10762-013-9984-4
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Ellipsometry is a technique whereby the measurement of the two orthogonal polarization components of light reflected at glancing incidence allows a characterization of the optical properties of a material at a particular frequency. Importantly, it obviates the need for measurement against a standard reference sample, and so can provide reliable spectroscopic information even when surface morphology is unknown, of marginal quality and/or a reference is unavailable. Although a standard technique in the visible range, it has not been widely applied in the Terahertz (THz) spectral range despite its potential utility. This is largely because of the technical difficulties that these frequencies present. This review details recent progress in the implementation of THz range ellipsometry. We discuss a variety of configurations including various kinds of laboratory and facility based sources using both continuous wave and pulsed spectroscopic methods. We discuss the general problems encountered when trying to import the methodologies of visible range ellipsometry to the THz range and give examples of where the technique has been successful thus far.
引用
收藏
页码:682 / 708
页数:27
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