A physical insight into the quasi-saturation effect in VDMOS power transistors

被引:3
作者
Li, ZM
Mawby, PA
Board, K
机构
[1] Department of Electrical and Electronic Engineering, University of Wales, Swansea, SA2 8PP, Singleton Park
关键词
D O I
10.1080/002072197135599
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The physical mechanisms that cause quasi-saturation phenomena in a commercial 500 V VDMOS device are studied and modelled using a two-dimensional numerical simulator. It is found that there exist two mechanisms that limit the drain current and lead the device into quasi-saturation. These are the formation of a gate-independent dipole layer, and the high resistivity of the drift region. A modified VDMOS structure with an ion-implanted region is proposed which increases the drain current carrying capability and reduces the on-resistance by up to 60%.
引用
收藏
页码:13 / 22
页数:10
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