Changes of the thermally oxidized porous silicon conductivity induced by adsorption and electric field

被引:0
|
作者
Petrov, AA [1 ]
Kozlov, SN [1 ]
Demidovich, GB [1 ]
Demidovich, VM [1 ]
机构
[1] Moscow MV Lomonosov State Univ, Dept Phys, Moscow 119899, Russia
来源
PHYSICS OF LOW-DIMENSIONAL STRUCTURES | 1999年 / 7-8卷
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O59 [应用物理学];
学科分类号
摘要
Thermal oxidation of porous silicon was demonstrated to reduce drastically the adsorption sensitivity of the porous layer conductivity. Considerable increase of the conductivity of silicon-oxidized porous silicon-metal structures placed in water or ethanol vapor under forward voltage has been observed. The effect was attributed to the modulation of conductivity of non-oxidized cores of porous silicon wires by the mobile ion charge drifting along the oxide surfaces.
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页码:1 / 7
页数:7
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