HIGH-PRECISION DRY MICRO-ELECTRO-DISCHARGE MACHINING OF CARBON-NANOTUBE FORESTS WITH ULTRALOW DISCHARGE ENERGY
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作者:
Saleh, Tanveer
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机构:
Univ British Columbia, Vancouver, BC V5Z 1M9, CanadaUniv British Columbia, Vancouver, BC V5Z 1M9, Canada
Saleh, Tanveer
[1
]
Dahmardeh, Masoud
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Univ British Columbia, Vancouver, BC V5Z 1M9, CanadaUniv British Columbia, Vancouver, BC V5Z 1M9, Canada
Dahmardeh, Masoud
[1
]
Bsoul, Anas
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Univ British Columbia, Vancouver, BC V5Z 1M9, CanadaUniv British Columbia, Vancouver, BC V5Z 1M9, Canada
Bsoul, Anas
[1
]
Nojeh, Alireza
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Univ British Columbia, Vancouver, BC V5Z 1M9, CanadaUniv British Columbia, Vancouver, BC V5Z 1M9, Canada
Nojeh, Alireza
[1
]
Takahata, Kenichi
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Univ British Columbia, Vancouver, BC V5Z 1M9, CanadaUniv British Columbia, Vancouver, BC V5Z 1M9, Canada
Takahata, Kenichi
[1
]
机构:
[1] Univ British Columbia, Vancouver, BC V5Z 1M9, Canada
来源:
2012 IEEE 25TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS)
|
2012年
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中图分类号:
TM [电工技术];
TN [电子技术、通信技术];
学科分类号:
0808 ;
0809 ;
摘要:
This work investigates reverse-polarity dry micro-electro-discharge machining (mu EDM) of pure carbon-nanotube (CNT) forests that are used as cathodes in the process, as opposed to conventional mu EDM where the material to be machined forms the anode. The new configuration with the reversed polarity is observed to generate higher discharge currents, most likely due to effective field-emission from CNTs. This effect allows the process to be performed at very low discharge energies, similar to 80x smaller than in the conventional normal-polarity case, with the machining voltage and tolerance down to 10 V and 2.5 mu m, respectively, enabling high-precision high-aspect-ratio micropatterning in the forests.
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相关论文
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[1]
Dahmardeh M, 2011, PROC IEEE MICR ELECT, P272, DOI 10.1109/MEMSYS.2011.5734414
机构:
Univ Michigan, Dept Mech Engn, Ann Arbor, MI 48109 USA
Seoul Natl Univ, Sch Mech & Aerosp Engn, Seoul 151742, South KoreaUniv Michigan, Dept Mech Engn, Ann Arbor, MI 48109 USA
Ok, Jong Girl
;
Kim, Bo Hyun
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Andong Natl Univ, Sch Mech Engn, Andong 760749, Kyungbuk, South KoreaUniv Michigan, Dept Mech Engn, Ann Arbor, MI 48109 USA
Kim, Bo Hyun
;
Chung, Do Kwan
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Seoul Natl Univ, Sch Mech & Aerosp Engn, Seoul 151742, South KoreaUniv Michigan, Dept Mech Engn, Ann Arbor, MI 48109 USA
Chung, Do Kwan
;
Sung, Woo Yong
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Seoul Natl Univ, Sch Mech & Aerosp Engn, Seoul 151742, South KoreaUniv Michigan, Dept Mech Engn, Ann Arbor, MI 48109 USA
Sung, Woo Yong
;
Lee, Seung Min
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Seoul Natl Univ, Sch Mech & Aerosp Engn, Seoul 151742, South KoreaUniv Michigan, Dept Mech Engn, Ann Arbor, MI 48109 USA
Lee, Seung Min
;
Lee, Sewon
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Seoul Natl Univ, Sch Mech & Aerosp Engn, Seoul 151742, South KoreaUniv Michigan, Dept Mech Engn, Ann Arbor, MI 48109 USA
Lee, Sewon
;
Kim, Wal Jun
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Seoul Natl Univ, Sch Mech & Aerosp Engn, Seoul 151742, South KoreaUniv Michigan, Dept Mech Engn, Ann Arbor, MI 48109 USA
Kim, Wal Jun
;
Park, JinWoo
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Seoul Natl Univ, Sch Mech & Aerosp Engn, Seoul 151742, South KoreaUniv Michigan, Dept Mech Engn, Ann Arbor, MI 48109 USA
Park, JinWoo
;
Chu, Chong Nam
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Seoul Natl Univ, Sch Mech & Aerosp Engn, Seoul 151742, South KoreaUniv Michigan, Dept Mech Engn, Ann Arbor, MI 48109 USA
Chu, Chong Nam
;
Kim, Yong Hyup
论文数: 0引用数: 0
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Seoul Natl Univ, Sch Mech & Aerosp Engn, Seoul 151742, South Korea
Seoul Natl Univ, Inst Adv Aerosp Technol, Seoul 151742, South KoreaUniv Michigan, Dept Mech Engn, Ann Arbor, MI 48109 USA
机构:
Univ Michigan, Dept Mech Engn, Ann Arbor, MI 48109 USA
Seoul Natl Univ, Sch Mech & Aerosp Engn, Seoul 151742, South KoreaUniv Michigan, Dept Mech Engn, Ann Arbor, MI 48109 USA
Ok, Jong Girl
;
Kim, Bo Hyun
论文数: 0引用数: 0
h-index: 0
机构:
Andong Natl Univ, Sch Mech Engn, Andong 760749, Kyungbuk, South KoreaUniv Michigan, Dept Mech Engn, Ann Arbor, MI 48109 USA
Kim, Bo Hyun
;
Chung, Do Kwan
论文数: 0引用数: 0
h-index: 0
机构:
Seoul Natl Univ, Sch Mech & Aerosp Engn, Seoul 151742, South KoreaUniv Michigan, Dept Mech Engn, Ann Arbor, MI 48109 USA
Chung, Do Kwan
;
Sung, Woo Yong
论文数: 0引用数: 0
h-index: 0
机构:
Seoul Natl Univ, Sch Mech & Aerosp Engn, Seoul 151742, South KoreaUniv Michigan, Dept Mech Engn, Ann Arbor, MI 48109 USA
Sung, Woo Yong
;
Lee, Seung Min
论文数: 0引用数: 0
h-index: 0
机构:
Seoul Natl Univ, Sch Mech & Aerosp Engn, Seoul 151742, South KoreaUniv Michigan, Dept Mech Engn, Ann Arbor, MI 48109 USA
Lee, Seung Min
;
Lee, Sewon
论文数: 0引用数: 0
h-index: 0
机构:
Seoul Natl Univ, Sch Mech & Aerosp Engn, Seoul 151742, South KoreaUniv Michigan, Dept Mech Engn, Ann Arbor, MI 48109 USA
Lee, Sewon
;
Kim, Wal Jun
论文数: 0引用数: 0
h-index: 0
机构:
Seoul Natl Univ, Sch Mech & Aerosp Engn, Seoul 151742, South KoreaUniv Michigan, Dept Mech Engn, Ann Arbor, MI 48109 USA
Kim, Wal Jun
;
Park, JinWoo
论文数: 0引用数: 0
h-index: 0
机构:
Seoul Natl Univ, Sch Mech & Aerosp Engn, Seoul 151742, South KoreaUniv Michigan, Dept Mech Engn, Ann Arbor, MI 48109 USA
Park, JinWoo
;
Chu, Chong Nam
论文数: 0引用数: 0
h-index: 0
机构:
Seoul Natl Univ, Sch Mech & Aerosp Engn, Seoul 151742, South KoreaUniv Michigan, Dept Mech Engn, Ann Arbor, MI 48109 USA
Chu, Chong Nam
;
Kim, Yong Hyup
论文数: 0引用数: 0
h-index: 0
机构:
Seoul Natl Univ, Sch Mech & Aerosp Engn, Seoul 151742, South Korea
Seoul Natl Univ, Inst Adv Aerosp Technol, Seoul 151742, South KoreaUniv Michigan, Dept Mech Engn, Ann Arbor, MI 48109 USA