Readout Interface for Capacitive MEMS Microphone in CMOS Technology

被引：0

作者：

Arbet, Daniel ^{[1
]}

Nagy, Gabriel ^{[1
]}

Kovac, Martin ^{[1
]}

Stopjakova, Viera ^{[1
]}

Nagy, Lukas ^{[1
]}

机构：

[1] Slovak Univ Technol Bratislava, Fac Elect Engn & Informat Technol, Inst Elect & Photon, Bratislava, Slovakia

来源：

2015 22ND INTERNATIONAL CONFERENCE MIXED DESIGN OF INTEGRATED CIRCUITS & SYSTEMS (MIXDES) | 2015年

关键词：

Readout interface; MEMS microphone; fully differential difference amplifier; low harmonic distortion; low noise; high dynamic range;

D O I：

暂无

中图分类号：

TP301 [理论、方法];

学科分类号：

081202 ;

摘要：

This paper presents the frontend part of the readout interface for a capacitive MEMS microphone designed and fabricated in 0.35 mu m CMOS technology. The developed readout interface will be used in a noise dosimeter applicable in very noisy and harsh environment. The prototype chips were measured and the main parameters evaluated. The achieved results demonstrate low harmonic distortion, low noise and high dynamic range of the developed readout interface.

引用

页码：370 / 374

页数：5

共 13 条

[1] Aezinia F., 2013, 2013 26 IEEE CAN C E, P1
[2] Cheng-Ta Chiang, 2010, 2010 International Symposium on Computer, Communication, Control and Automation (3CA 2010), P249, DOI 10.1109/3CA.2010.5533544
[3] A 15-bit 140-μW Scalable-Bandwidth Inverter-Based ΔΣ Modulator for a MEMS Microphone With Digital Output
Christen, Thomas
[J]. IEEE JOURNAL OF SOLID-STATE CIRCUITS, 2013, 48 (07) : 1605 - 1614
[4] FULLY DIFFERENTIAL BASIC BUILDING-BLOCKS BASED ON FULLY DIFFERENTIAL-DIFFERENCE AMPLIFIERS WITH UNITY-GAIN DIFFERENCE FEEDBACK
DUQUECARRILLO, JF
TORELLI, G
PEREZALOE, R
VALVERDE, JM
MALOBERTI, F
[J]. IEEE TRANSACTIONS ON CIRCUITS AND SYSTEMS I-FUNDAMENTAL THEORY AND APPLICATIONS, 1995, 42 (03): : 190 - 192
[5] Capacitive MEMS microphones
Elko, GW
Pardo, F
López, D
Bishop, D
Gammel, P
[J]. BELL LABS TECHNICAL JOURNAL, 2005, 10 (03) : 187 - 198
[6] Furst CE, 1996, ISCAS 96: 1996 IEEE INTERNATIONAL SYMPOSIUM ON CIRCUITS AND SYSTEMS - CIRCUITS AND SYSTEMS CONNECTING THE WORLD, VOL 1, P477, DOI 10.1109/ISCAS.1996.539988
[7] Design and fabrication of a new MEMS capacitive microphone using a perforated aluminum diaphragm
Ganji, Bahram Azizollah
Majlis, Burhanuddin Yeop
[J]. SENSORS AND ACTUATORS A-PHYSICAL, 2009, 149 (01) : 29 - 37
[8] Jawed SA, 2006, PRIME 2006: 2ND CONFERENCE ON PH.D. RESEARCH IN MICROELECTRONIC AND ELECTRONICS, PROCEEDINGS, P385
[9] Jung-Tang Huang, 2011, Proceedings of the 2011 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2011), P948, DOI 10.1109/NEMS.2011.6017511
[10] A NEW CAPACITIVE TYPE MEMS MICROPHONE
Leinenbach, Christina
van Teeffelen, Kathrin
Laermer, Franz
Seidel, Helmut
[J]. MEMS 2010: 23RD IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2010, : 659 - 662

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