In-situ Raman spectroscopy and X-ray diffraction studies of the structural transformations leading to the SrCu2O2 phase from strontium copper oxide thin films deposited by metalorganic chemical vapor deposition

被引:20
作者
Khan, A. [1 ,2 ]
Jimenez, C. [1 ]
Chaix-Pluchery, O. [1 ]
Roussel, H. [1 ]
Deschanvres, J. L. [1 ]
机构
[1] Minatec, CNRS, Grenoble INP, Lab Mat & Genie Phys, F-38016 Grenoble, France
[2] Univ Peshawar, Inst Phys & Elect, Khyber Pakhtunkhwa 25120, Pakistan
关键词
SrCu2O2; Strontium-copper oxide films; MOCVD; Transparent conductive oxides; Phase transformations; In-situ Raman spectroscopy; In-situ X-ray diffraction; PULSED-LASER DEPOSITION; INJECTION MOCVD; O SYSTEM; TRANSPARENT; GROWTH; HETEROJUNCTION; SR14CU24O41; FABRICATION; EVAPORATION; EQUILIBRIA;
D O I
10.1016/j.tsf.2012.10.133
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
SrCu2O2 (SCO) thin films were obtained by annealing strontium-copper oxide films grown on silicon substrate by metalorganic chemical vapor deposition. The phase transformations occurring in the films during different annealing conditions were studied by in-situ Raman spectroscopy and X-ray diffraction (XRD) combined with ex-situ XRD and Fourier Transformed Infrared Spectroscopy measurements. The first transformation was characterized by the decomposition of SrCO3 and CuO mainly into the Sr14Cu24O41 phase when the films were annealed in oxygen atmosphere. The transformation of this phase into the expected SCO phase was observed after subsequent annealing under Ar. In-situ studies revealed that the SCO phase is preserved at room temperature only when the film is cooled down very quickly. (C) 2012 Elsevier B.V. All rights reserved.
引用
收藏
页码:136 / 141
页数:6
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