共 24 条
[5]
Sensing characteristics of ruthenium films fabricated by radio frequency sputtering
[J].
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS,
2005, 44 (03)
:1403-1408
[9]
Guerin LJ, 1997, TRANSDUCERS 97 - 1997 INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS AND ACTUATORS, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, P1419, DOI 10.1109/SENSOR.1997.635730