Analytical current-voltage model for polycrystalline-silicon thin-film transistors

被引:7
作者
Kimura, M [1 ]
Takizawa, T [1 ]
Inoue, S [1 ]
Shimoda, T [1 ]
机构
[1] Seiko Epson Corp, Technol Platform Res Ctr, Nagano 3990293, Japan
关键词
Active Layer - Conventional methods - Current-voltage models - Density equations - Insulator substrates - Polycrystalline silicon thin-film transistor - Surface state density;
D O I
10.1063/1.1465108
中图分类号
O59 [应用物理学];
学科分类号
摘要
An analytical current-voltage model has been developed for polycrystalline-silicon thin-film transistors. This model is based on the Poisson equation and the carrier density equation on the condition that the active layer is intrinsic and fabricated on the insulator substrate. The surface state density was determined, and it was found that the conventional method underestimates this density. (C) 2002 American Institute of Physics.
引用
收藏
页码:2326 / 2328
页数:3
相关论文
共 7 条
[1]   Two-dimensional numerical simulation of solid-phase-crystallized polysilicon thin-film transistor characteristics [J].
Chou, TKA ;
Kanicki, J .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1999, 38 (4B) :2251-2255
[2]   MODEL FOR THE ABOVE-THRESHOLD CHARACTERISTICS AND THRESHOLD VOLTAGE IN POLYCRYSTALLINE SILICON TRANSISTORS [J].
FORTUNATO, G ;
MIGLIORATO, P .
JOURNAL OF APPLIED PHYSICS, 1990, 68 (05) :2463-2467
[3]  
KIMURA M, 2001, AM LCD 01, P191
[4]  
LUI OKB, 1998, AM LCD 98, P185
[5]  
OHSHIMA H, 1996, P EUR DISPL WORKSH, P17
[6]   Crystalline properties of laser crystallized silicon films [J].
Sameshima, T ;
Saitoh, K ;
Sato, M ;
Tajima, A ;
Takashima, N .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1997, 36 (10B) :L1360-L1363
[7]  
SZE SM, 1981, PHYSICS SEMICONDUCTO