Three-Dimensional Continuous Displacement Measurement with Temporal Speckle Pattern Interferometry

被引:24
作者
Qin, Jie [1 ]
Gao, Zhan [1 ]
Wang, Xu [1 ]
Yang, Shanwei [1 ]
机构
[1] Beijing Jiaotong Univ, Key Lab Luminescence & Opt Informat, Minist Educ, Beijing 100044, Peoples R China
来源
SENSORS | 2016年 / 16卷 / 12期
基金
中国国家自然科学基金;
关键词
displacement sensor; three-dimensional measurement; temporal spackle pattern interferometry; wavelet transform; PHASE EVALUATION; TRANSFORM; FOURIER; ESPI;
D O I
10.3390/s16122020
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
A speckle interferometer which can measure whole field three-dimensional displacements continuously and dynamically has been built. Three different wavelength lasers are used to produce the speckle interferograms of the two in-plane displacements (displacements in the x-and y-direction) and one out-of-plane displacement (displacement in the z-direction), respectively. One color CCD camera is employed to collect these mixed speckle interferograms simultaneously. The mixed interferograms are separated by the Red, Green and Blue channels of the color CCD camera, and then are processed by the wavelet transform technique to extract the phase information of the measured object. The preliminary experiment is carried out to demonstrate the performance of this new device.
引用
收藏
页数:13
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