The integration of nanowires and nanotubes with microstructures

被引：8

作者：

Englander, Ongi ^{[1
]}

Christensen, Dane ^{[2
]}

Lin, Liwei ^{[2
]}

机构：

[1] FAMU FSU Coll Engn, Dept Mech Engn, Tallahassee, FL 32310 USA

[2] Univ Calif Berkeley, Berkeley Sensor & Actuator Ctr, Dept Mech Engn, Berkeley, CA 94720 USA

来源：

INTERNATIONAL JOURNAL OF MATERIALS & PRODUCT TECHNOLOGY | 2009年 / 34卷 / 1-2期

基金：

美国国家科学基金会;

关键词：

SiNWs; silicon nanowires; CNTs; carbon nanotubes; MEMS; microelectromechanical systems; NEMS; nanoelectromechanical systems; direct integration; synthesis; self-assembly; one-dimensional nanostructures; CARBON NANOTUBES; SILICON NANOWIRES; CATALYTIC GROWTH; MECHANISM;

D O I：

10.1504/IJMPT.2009.022405

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A technique for the localised synthesis, self-assembly and direct integration of nanostructures with microstructures employing the localised synthesis of nanostructures onto Microclectromechanical Systems (MEMS) structures is demonstrated. The in-situ guided growth process of the nanostructures is accomplished using a locally applied electric-field realised by using the MEMS structures as electrodes. The self-assembly and self-terminated contact process of nanostructures is achieved when the hot nanostructure makes contact with the cold MEMS structure. This approach is flexible and both Silicon Nanowires (SiNWs) and Carbon Nanotubes (CNTs) have been successfully integrated to form Nanoelectromechanical Systems (NEMS) devices. These systems are potentially available for sensing applications with or without further functionalisation. As such, this approach mitigates integration and manufacturing difficulties which currently plague the fabrication of nanoscale devices.

引用

页码：77 / 94

页数：18

共 34 条

[1] A FORMATION MECHANISM FOR CATALYTICALLY GROWN HELIX-SHAPED GRAPHITE NANOTUBES [J].

AMELINCKX, S ;

ZHANG, XB ;

BERNAERTS, D ;

ZHANG, XF ;

IVANOV, V ;

NAGY, JB .

SCIENCE, 1994, 265 (5172) :635-639

[2] Carbon nanotube actuators [J].

Baughman, RH ;

Cui, CX ;

Zakhidov, AA ;

Iqbal, Z ;

Barisci, JN ;

Spinks, GM ;

Wallace, GG ;

Mazzoldi, A ;

De Rossi, D ;

Rinzler, AG ;

Jaschinski, O ;

Roth, S ;

Kertesz, M .

SCIENCE, 1999, 284 (5418) :1340-1344

[3] Enzyme-coated carbon nanotubes as single-molecule biosensors [J].

Besteman, K ;

Lee, JO ;

Wiertz, FGM ;

Heering, HA ;

Dekker, C .

NANO LETTERS, 2003, 3 (06) :727-730

[4] Surface micromachining for microelectromechanical systems [J].

Bustillo, JM ;

Howe, RT ;

Muller, RS .

PROCEEDINGS OF THE IEEE, 1998, 86 (08) :1552-1574

[5] Self-buckling of micromachined beams under resistive heating [J].

Chiao, M ;

Lin, LW .

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2000, 9 (01) :146-151

[6]

CHRISTENSEN D, 2005, MECH ENG

[7] Nanowire nanosensors for highly sensitive and selective detection of biological and chemical species [J].

Cui, Y ;

Wei, QQ ;

Park, HK ;

Lieber, CM .

SCIENCE, 2001, 293 (5533) :1289-1292

[8] High performance silicon nanowire field effect transistors [J].

Cui, Y ;

Zhong, ZH ;

Wang, DL ;

Wang, WU ;

Lieber, CM .

NANO LETTERS, 2003, 3 (02) :149-152

[9] Mycophenolate mofetil modulates adhesion receptors of the beta1 integrin family on tumor cells:: impact on tumor recurrence and malignancy -: art. no. 4 [J].

Engl, T ;

Makarevic, J ;

Relja, B ;

Natsheh, I ;

Müller, I ;

Beecken, WD ;

Jonas, D ;

Blaheta, RA .

BMC CANCER, 2005, 5 (1)

[10] Local synthesis of silicon nanowires and carbon nanotubes on microbridges [J].

Englander, O ;

Christensen, D ;

Lin, LW .

APPLIED PHYSICS LETTERS, 2003, 82 (26) :4797-4799

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