共 21 条
Elastic theory for strained heterostructures with in-plane anisotropy
被引:12
作者:
Arimoto, Keisuke
[1
]
Nakagawa, Kiyokazu
[1
]
机构:
[1] Univ Yamanashi, Ctr Crystal Sci & Technol, Yamanashi 4008511, Japan
关键词:
D O I:
10.1063/1.2977673
中图分类号:
O59 [应用物理学];
学科分类号:
摘要:
An analytical formulation of elastic strain in epitaxially grown crystalline film was derived. The concept of anisotropic in-plane strain was included in the method, which is applicable to the investigation of strained films with an anisotropic defect configuration or fabrication-induced anisotropic stress. The developed method applies to arbitrary crystal classes with arbitrary surface orientations. (C) 2008 American Institute of Physics. [DOI: 10.1063/1.2977673]
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