Elastic theory for strained heterostructures with in-plane anisotropy

被引:12
作者
Arimoto, Keisuke [1 ]
Nakagawa, Kiyokazu [1 ]
机构
[1] Univ Yamanashi, Ctr Crystal Sci & Technol, Yamanashi 4008511, Japan
关键词
D O I
10.1063/1.2977673
中图分类号
O59 [应用物理学];
学科分类号
摘要
An analytical formulation of elastic strain in epitaxially grown crystalline film was derived. The concept of anisotropic in-plane strain was included in the method, which is applicable to the investigation of strained films with an anisotropic defect configuration or fabrication-induced anisotropic stress. The developed method applies to arbitrary crystal classes with arbitrary surface orientations. (C) 2008 American Institute of Physics. [DOI: 10.1063/1.2977673]
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页数:8
相关论文
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APPLIED PHYSICS LETTERS, 1994, 65 (22) :2789-2791