Improvement of Magnetic Force Microscope Resolution and Application to High-Density Recording Media

被引:8
|
作者
Futamoto, Masaaki [1 ]
Hagami, Tatsuya [1 ]
Ishihara, Shinji [1 ]
Soneta, Kazuki [1 ]
Ohtake, Mitsuru [1 ]
机构
[1] Chuo Univ, Fac Sci & Engn, Bunkyo Ku, Tokyo 1128551, Japan
关键词
Magnetic force microscope; magnetic material coating; spatial resolution; switching field; tip preparation; TIPS; PROBE;
D O I
10.1109/TMAG.2013.2251868
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Magnetic force microscope (MFM) tips are prepared by coating magnetic materials on nonmagnetic Si tips with 4 nm radius. The effects of magnetic material and coating thickness on the MFM resolution and the switching field are investigated. MFM resolutions better than 8 nm have been confirmed with tips coated with soft magnetic or hard magnetic materials with optimized thicknesses. The switching field varies in a wide range 0.1-3.0 kOe depending on the coating material and the coating thickness (10-80 nm). High-resolution MFM tips are applied to the observations of magnetization structures of perpendicular and bit-patterned media samples. Magnetization structures of less than 20 nm in scale are clearly observed.
引用
收藏
页码:2748 / 2754
页数:7
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