Elastic strain relaxation and piezoeffect in GaN-AlN, GaN-AlGaN and GaN-InGaN superlattices

被引:264
作者
Bykhovski, AD [1 ]
Gelmont, BL [1 ]
Shur, MS [1 ]
机构
[1] UNIV VIRGINIA,DEPT ELECT ENGN,CHARLOTTESVILLE,VA 22903
关键词
D O I
10.1063/1.364368
中图分类号
O59 [应用物理学];
学科分类号
摘要
We calculated the elastic strain relaxation in (GaN)(n)-(AlN)(n), (GaN)(n)(AlxGa1-xN)(n) and (GaN)(n)(InxGa1-xN)(n) superlattices where n is the number of layers in the superlattice cell. This calculation and a similar calculation for a semiconductor-insulator-semiconductor structure allowed us to determine the lower and upper bounds for the elastic strain relaxation in (GaN)(m)(AlN)(n) superlattices with arbitrary n/m ratios, i.e., we determine a full range of the critical thicknesses for GaNm(AlN)(n) superlattices. The obtained theoretical results can also be applied to other superlattices based on III nitrides and their solid solutions. Our theory agrees with the experimental data for GaN-AlN superlattices. Also, we shaw that the piezoelectric effect may cause a large shift of the absorption edge in defect-free GaNm(AlxGa1-xN)(n) superlattices. (C) 1997 American Institute of Physics.
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页码:6332 / 6338
页数:7
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