共 27 条
[14]
High-rate deposition of biaxially textured yttria-stabilized zirconia by dual magnetron oblique sputtering
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A,
1999, 17 (05)
:2826-2829
[17]
Lopez-Gandara C., 2009, J SENS, V2009
[18]
Biaxial alignment in sputter deposited thin films
[J].
THIN SOLID FILMS,
2006, 515 (04)
:1229-1249
[20]
Microstructural evolution during film growth
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A,
2003, 21 (05)
:S117-S128