Electron stimulated desorption on diamond (100) as a negative hydrogen source

被引：15

作者：

Goeden, C ^{[1
]}

Dollinger, G ^{[1
]}

机构：

[1] Tech Univ Munich, Phys Dept E12, D-85748 Garching, Germany

来源：

APPLIED SURFACE SCIENCE | 1999年 / 147卷 / 1-4期

关键词：

stimulated desorption; ESD; diamond; negative ions;

D O I：

10.1016/S0169-4332(99)00092-6

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The electron-stimulated desorption of negatively charged hydrogen ions from diamond surfaces is studied with respect to an application as a bright ion source. Bombarding an (100)-oriented, boron-doped single crystal diamond with 40-mu A electrons at energies up to 12 keV, a maximum ion current of 700 pA negative hydrogen is obtained. A supply of 1.0 X 10(-4) mbar atomic deuterium results in a steady-state ion current of 30 pA. The ionization cross section has been proven to vary one order of magnitude between 3.5 x 10(-18) cm(2) and 5 x 10(-19) cm2 with hydrogen coverage of the surface. This effect might be caused by the changing electron affinity of the diamond. (C) 1999 Elsevier Science B.V. All rights reserved.

引用

页码：107 / 113

页数：7

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