共 16 条
[2]
STRUCTURAL AND COMPOSITIONAL CHARACTERIZATION OF SPUTTER-DEPOSITED WC+CO FILMS
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY,
1978, 15 (02)
:396-400
[3]
An economic analysis of the deposition of electrochromic WO3 via sputtering or plasma enhanced chemical vapor deposition
[J].
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY,
2005, 119 (03)
:224-231
[5]
Jiang Yan.Mei, 1992, THESIS
[10]
Martin P.M., 2009, Handbook of Deposition Technologies for Films and Coatings: Science, Applications and Technology