High-Resolution 3D Printed Photonic Waveguide Devices

被引:39
作者
Gao, Hongwei [1 ]
Chen, George F. R. [1 ]
Xing, Peng [1 ]
Choi, Ju Won [1 ]
Low, Hong Yee [2 ]
Tan, Dawn T. H. [1 ]
机构
[1] Singapore Univ Technol & Design, Photon Devices & Syst Grp, 8 Somapah Rd, Singapore 487372, Singapore
[2] Singapore Univ Technol & Design, Engn Prod Dev, 8 Somapah Rd, Singapore 487372, Singapore
基金
新加坡国家研究基金会;
关键词
3D waveguide devices; gratings; polymer waveguides; resonators; GENERATION;
D O I
10.1002/adom.202000613
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Photonic building blocks fabricated using two-photon polymerization laser lithography are reported. 3D polymer structures are fabricated using a direct laser writing process with nonlinear two-photon absorption in photosensitive material. The 3D photonic structures include 3D photonic waveguides, Bragg gratings, and resonators. In particular, high-quality spiral and air-bridge waveguides providing 3D light guiding beyond a single plane are demonstrated. Sub-micrometer features as well as unique coupling interfaces with 1.6 dB coupling losses and large 3 dB bandwidth are also demonstrated. Experimental characterization reveals the good transmission performance of the fabricated photonic devices. In addition, the waveguides are demonstrated to support 30 Gb s(-1)NRZ (nonreturn to zero) and 56 Gb s(-1)PAM4 (pulse amplitude modulation 4) high-speed data. Small power penalties of 0.7 dB for NRZ (BER = 10(-12)) and 1.5 dB for PAM4 (BER = 10(-6)) are obtained.
引用
收藏
页数:8
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