Improved fifth-order geometric aberration coeincients of electron lenses

被引：7

作者：

Liu, ZX ^{[1
]}

机构：

[1] Peking Univ, Dept Elect, Beijing 100871, Peoples R China

来源：

JOURNAL OF PHYSICS D-APPLIED PHYSICS | 2004年 / 37卷 / 05期

关键词：

D O I：

10.1088/0022-3727/37/5/002

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

In this paper, fifth-order geometric aberrations of round electron lenses have been restudied. Improved analytical formulae of the aberration coefficients were derived by the computer algebra software-Mathematica-and their correctness verified by cross-checking with numerical integration and differential algebraic techniques for a given electromagnetic lens.

引用

页码：653 / 659

页数：7

共 14 条

[1] ARBITRARY ORDER DESCRIPTION OF ARBITRARY PARTICLE OPTICAL-SYSTEMS [J].

BERZ, M .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1990, 298 (1-3) :426-440

[2] COMPUTATIONAL ASPECTS OF OPTICS DESIGN AND SIMULATION - COSY INFINITY [J].

BERZ, M .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1990, 298 (1-3) :473-479

[3] GEOMETRICAL ABERRATIONS OF GENERAL ELECTRON OPTICAL SYSTEMS .2. PRIMARY (3RD ORDER) ABERRATIONS OF ORTHOGONAL SYSTEMS AND SECONDARY (5TH ORDER) ABERRATIONS OF ROUND SYSTEMS [J].

HAWKES, PW .

PHILOSOPHICAL TRANSACTIONS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL AND PHYSICAL SCIENCES, 1965, 257 (1086) :523-&

[4] Relationship between fifth-order aberration coefficients in rotationally symmetric electron optical system [J].

Hosokawa, T .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2001, 34 (10) :1470-1473

[5]

LI Y, 1988, OPTIK, V78, P45

[6]

LIU Z, 2002, 6 INT C CHARGED PART

[7] Fifth-order canonical geometric aberration analysis of electrostatic round lenses [J].

Liu, ZX .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2002, 488 (1-2) :42-50

[8] COSYINFINITY version 8 [J].

Makino, K ;

Berz, M .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1999, 427 (1-2) :338-343

[9]

ROSE H, 1971, OPTIK, V33, P151

[10] FIFTH-ORDER ABERRATION ANALYSIS OF A COMBINED ELECTROSTATIC-MAGNETIC FOCUSING-DEFLECTION SYSTEM [J].

UNO, Y ;

MORITA, H ;

SIMAZU, N ;

HOSOKAWA, T .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1995, 363 (1-2) :10-17

← 1 2 →