Calibration of Deformable Mirrors for Open-Loop Control

被引：0

作者：

Leutenegger, Marcel ^{[1
]}

Hell, Stefan W. ^{[1
]}

机构：

[1] Max Planck Inst Multidisciplinary Sci, Dept NanoBiophoton, Fassberg 11, D-37077 Gottingen, Germany

来源：

SENSORS | 2022年 / 22卷 / 21期

关键词：

off-axis interferometry; phase unwrapping; deformable mirror control; ADAPTIVE-OPTICS; PHASE; COMPENSATION; AMPLITUDE; SENSOR;

D O I：

10.3390/s22218465

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Deformable mirrors enable the control of wave fronts for the compensation of aberrations in optical systems and/or for beam scanning. Manufacturers of deformable mirrors typically provide calibration data that encode for the fabrication tolerances among the actuators and mirror segments to support open-loop control with high wave front fidelity and accuracy. We report a calibration method that enables users of the deformable mirrors to measure the response of the mirror itself to validate and improve the calibration data. For this purpose, an imaging off-axis Michelson interferometer was built that allowed measuring the mirror topography with high accuracy and sufficient spatial resolution. By calibrating each actuator over its entire range, the open-loop performance for our deformable mirror was improved.

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页数：13

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