Calibration of Deformable Mirrors for Open-Loop Control

被引:0
作者
Leutenegger, Marcel [1 ]
Hell, Stefan W. [1 ]
机构
[1] Max Planck Inst Multidisciplinary Sci, Dept NanoBiophoton, Fassberg 11, D-37077 Gottingen, Germany
关键词
off-axis interferometry; phase unwrapping; deformable mirror control; ADAPTIVE-OPTICS; PHASE; COMPENSATION; AMPLITUDE; SENSOR;
D O I
10.3390/s22218465
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
Deformable mirrors enable the control of wave fronts for the compensation of aberrations in optical systems and/or for beam scanning. Manufacturers of deformable mirrors typically provide calibration data that encode for the fabrication tolerances among the actuators and mirror segments to support open-loop control with high wave front fidelity and accuracy. We report a calibration method that enables users of the deformable mirrors to measure the response of the mirror itself to validate and improve the calibration data. For this purpose, an imaging off-axis Michelson interferometer was built that allowed measuring the mirror topography with high accuracy and sufficient spatial resolution. By calibrating each actuator over its entire range, the open-loop performance for our deformable mirror was improved.
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页数:13
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