共 8 条
[1]
CASH W, 2000, IAU S, V205, P38
[2]
New fabrication methodology for fine feature-high aspect ratio structures made from high Z materials
[J].
MICROMACHINING AND MICROFABRICATION PROCESS TECHNOLOGY V,
1999, 3874
:321-329
[3]
X-ray multilevel zone plate fabrication by means of electron-beam lithography: Toward high-efficiency performances
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1999, 17 (06)
:3439-3443