Crack-free highly reflective AlInN/AlGaN bragg mirrors for UV applications -: art. no. 051108

被引:73
作者
Feltin, E [1 ]
Carlin, JF
Dorsaz, J
Christmann, G
Butté, R
Laügt, M
Ilegems, M
Grandjean, N
机构
[1] Ecole Polytech Fed Lausanne, IPEQ, CH-1015 Lausanne, Switzerland
[2] CNRS, CRHEA, F-06560 Valbonne, France
关键词
D O I
10.1063/1.2167399
中图分类号
O59 [应用物理学];
学科分类号
摘要
We report the growth of highly reflective distributed Bragg reflectors (DBRs) in the UV region using the Al0.85In0.15N/Al0.2Ga0.8N lattice-matched system. The DBRs were deposited on nearly strain-free Al0.2Ga0.8N templates to avoid strain-induced structural degradations. The appearance of cracks was then completely suppressed. The DBRs exhibit a reflectivity higher than 99% at a wavelength as short as similar to 340 nm and a stop band width of 215 meV (20 nm). (c) 2006 American Institute of Physics.
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页码:1 / 3
页数:3
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