Crack-free highly reflective AlInN/AlGaN bragg mirrors for UV applications -: art. no. 051108

被引：73

作者：

Feltin, E ^{[1
]}

Carlin, JF

Dorsaz, J

Christmann, G

Butté, R

Laügt, M

Ilegems, M

Grandjean, N

机构：

[1] Ecole Polytech Fed Lausanne, IPEQ, CH-1015 Lausanne, Switzerland

[2] CNRS, CRHEA, F-06560 Valbonne, France

来源：

APPLIED PHYSICS LETTERS | 2006年 / 88卷 / 05期

关键词：

D O I：

10.1063/1.2167399

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We report the growth of highly reflective distributed Bragg reflectors (DBRs) in the UV region using the Al0.85In0.15N/Al0.2Ga0.8N lattice-matched system. The DBRs were deposited on nearly strain-free Al0.2Ga0.8N templates to avoid strain-induced structural degradations. The appearance of cracks was then completely suppressed. The DBRs exhibit a reflectivity higher than 99% at a wavelength as short as similar to 340 nm and a stop band width of 215 meV (20 nm). (c) 2006 American Institute of Physics.

引用

页码：1 / 3

页数：3

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