Preparation of piezoelectric Pb(Zr,Ti)O3-Pb(Zn1/3Nb2/3)O3 thick films on ZrO2 substrates using low-temperature firing

Thick films of Pb(Zr,Ti)O-3-Pb(Zn1/3Nb2/3)O-3 (PZT-PZN) with additional PbO-TiO2-ZrO2-SiO2-Bi2O3 glass-ceramics were fabricated using a sequential process of screen-printing, drying, pressing, and firing. PZT-PZN paste containing the glass-ceramics was formed into thick films by firing it at temperatures above 700 degreesC, where the glass-ceramics enhanced the densification of the films by liquid-phase sintering. Press-treatment of the printed film done before firing also enhanced the densification. Dielectric constant, remnant polarization, and coercive field of the films were investigated as a function of the firing temperature, which ranged from 700 to 950 degreesC. The best properties were obtained for films fired at 800-850 degreesC. Piezoelectric actuations were demonstrated using unimorph cantilevers made from the films fired above 700 degreesC. 2002 Elsevier Science B.V. All rights reserved.